Simulation and experimental analysis of MEMS threshold adjustable switch

XU Ma-hui; LIU Feng-li; GUO Hang

doi:10.13873/J.1000-9787(2016)10-0028-04

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Simulation and experimental analysis of MEMS threshold adjustable switch

更新时间：2025-09-11

- Simulation and experimental analysis of MEMS threshold adjustable switch
- Vol. 35, Issue 10, Pages: 28-31(2016)
- 作者机构：
  
  1. 沈阳理工大学CAD/CAM技术研究与开发中心
  2. 厦门大学萨本栋微米纳米科学技术研究院
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2016)10-0028-04
  CLC： TH-39;TJ410.3
- Published：2016
- 稿件说明：
移动端阅览
[1]许马会,刘凤丽,郭航.MEMS阈值可调开关的仿真与实验分析[J].传感器与微系统,2016,35(10):28-31.

XU Ma-hui, LIU Feng-li, GUO Hang. Simulation and experimental analysis of MEMS threshold adjustable switch[J]. 2016, 35(10): 28-31.
[1]许马会,刘凤丽,郭航.MEMS阈值可调开关的仿真与实验分析[J].传感器与微系统,2016,35(10):28-31. DOI： 10.13873/J.1000-9787(2016)10-0028-04.

XU Ma-hui, LIU Feng-li, GUO Hang. Simulation and experimental analysis of MEMS threshold adjustable switch[J]. 2016, 35(10): 28-31. DOI： 10.13873/J.1000-9787(2016)10-0028-04.

摘要

微系统（MEMS）阈值可调开关是一种适用于弹药类型的通用碰炸开关

靠捕捉碰撞目标时的前冲惯性力而闭合。此开关除了受惯性力和静电力之外

还受到可动电极和驱动电极之间由于空气阻力而产生很大的阻尼力的影响。利用Coventor wave软件中的Saber系统仿真法

对设计的开关结构进行瞬态特性分析

仿真结果表明:开关在不同加速度信号下

阈值加速度与电压基本上呈反比关系

且随着阈值加速度的增大

电压减小。对加工的开关样件进行实验检测

实验结果表明开关可以实现阈值可调。

Abstract

MEMS threshold adjustable switch is a kind of general touch switch which is suitable for type of ammunition

it is closed by forward inertia force when the target is caught. In addition to inertia force and electrostatic force

the switch is also influenced by air resistance between movable electrode and driving electrode.By using saber system simulation method of Coventor wave software

analyze on transient characteristics of designed switch structure

and simulation results show that under different acceleration signals

threshold acceleration is inversely proportional to the voltage and the voltage decreases with increase of threshold acceleration. The samples are tested experimentally with switch-on processing and the test results show that the developed switch can realize the required adjustable threshold switching.

关键词

Keywords

references

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