Study on key fabrication process of micro F-P cavity tunable filter

LI Yuan-yuan; MENG Qing-hua; CHEN Si-hai; ZENG Yi-bo; GUO Hang

doi:10.13873/J.1000-9787(2016)10-0008-04

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Study on key fabrication process of micro F-P cavity tunable filter

更新时间：2025-09-11

- Study on key fabrication process of micro F-P cavity tunable filter
- Vol. 35, Issue 10, Pages: 8-11(2016)
- 作者机构：
  
  1. 中国科学院深圳先进技术研究院
  2. 西安电子科技大学微电子学院
  3. 厦门大学萨本栋微米纳米科学技术研究院
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2016)10-0008-04
  CLC： TN713
- Published：2016
- 稿件说明：
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[1]李元元,蒙庆华,陈四海,曾毅波,郭航.微F-P腔可调谐滤波器关键工艺研究[J].传感器与微系统,2016,35(10):8-11.

LI Yuan-yuan, MENG Qing-hua, CHEN Si-hai, et al. Study on key fabrication process of micro F-P cavity tunable filter[J]. 2016, 35(10): 8-11.
[1]李元元,蒙庆华,陈四海,曾毅波,郭航.微F-P腔可调谐滤波器关键工艺研究[J].传感器与微系统,2016,35(10):8-11. DOI： 10.13873/J.1000-9787(2016)10-0008-04.

LI Yuan-yuan, MENG Qing-hua, CHEN Si-hai, et al. Study on key fabrication process of micro F-P cavity tunable filter[J]. 2016, 35(10): 8-11. DOI： 10.13873/J.1000-9787(2016)10-0008-04.

摘要

采用表面加工工艺

AZ5214E光刻胶进行光刻并反转

磁控溅射Ni Cr合金

剥离出高度为2.3μm的金属桥墩

填充聚酰亚胺作为牺牲层

再在牺牲层上光刻、沉积金属形成金属桥面

在金属桥面的中心嵌入第二布拉格反射镜。采用O2等离子体刻蚀去除聚酰亚胺膜

制作成微法布里—珀罗（F-P）腔

不需要硅片键合

克服了传统F-P腔高度不够高、调谐范围有限、腔平整度不好以及对设备要求高的缺点

并且可以做出大阵列结构

易于探测器集成。着重对腔体关键工艺

即金属桥墩的Ni Cr剥离工艺进行研究

针对现有技术缺陷

提出解决办法。

Abstract

Using surface processing technology

AZ5214 E photoresist lithography and inverted

magnetron sputtering Ni Cr alloy

stripping out metal pier with height of 2. 3 μm

fill polyimide as sacrificial layer

and then on sacrificial layer photolithography

depositing metal to form metal bridge

in the center of metal bridge surface

embed the second Bragg reflector. Using O2 plasma etch and remove polyimide film

form cavity structure

without silicon bonding

overcome shortcoming that height is not high enough and the limited tuning range of traditional FP cavity

bad flatness of cavity and low demand of equipment

and it can make a large array structure

easy to integrate with the detector. Focus on key fabrication process that is Ni Cr metal stripping process

propose solutions based on existing technical defects.

关键词

Keywords

references

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