In laser processing of fabricating microsphere probe

microsphere center of probe tip deviated from axis of probe shaft

and probe tip biased obviously toward direction of incident laser. In order to solve this problem

propose a two-step processing strategy for fabricating microsphere probe. CO

2

laser beam is used as heat source to heat tip of probe shaft

so that shaft tip is heated to melt to produce a micro sphere. Probe shaft with a microsphere is rotated 180° around the axis

and the tip of the probe tip is irradiated with CO

2

laser beam to compensate the offset of the tip. Experimental results show that the method can significantly reduce bend of the microsphere tip relative to the shaft

and reduce the offset distance between tip spherical center and the cent

er line of the shaft.