Micro-opto-electro-mechanical system（ MOEMS） has wide application prospects in field of military and civilian due to its advantages of low cost

low power dissipation and tiny package. On the basis of analysis on classification mode of MOEMS scanning mirrors

frame and frame-less MOEMS scanning mirrors are disscussed for electrostatic-driven micromechanical integration types

then typical products and its system application are introduced. Difficult problems in system application is summed. The research status of domestic MOEMS scanning mirrors is introduced

as well as gap compared with foreign products is analyzed.