Research on frequency grading scanning method for surface acoustic wave temperature sensor

ZHENG Tian-xiang; LI Lu; CHEN Shuo

doi:10.13873/J.1000-9787(2016)05-0028-04

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Research on frequency grading scanning method for surface acoustic wave temperature sensor

更新时间：2025-09-11

- Research on frequency grading scanning method for surface acoustic wave temperature sensor
- Vol. 35, Issue 5, Pages: 28-31(2016)
- 作者机构：
  
  国网智能电网研究院
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2016)05-0028-04
  CLC： TP212
- Published：2016
- 稿件说明：
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[1]郑天祥,李璐,陈硕.声表面波温度传感器频率分级扫描方法研究[J].传感器与微系统,2016,35(05):28-31.

ZHENG Tian-xiang, LI Lu, CHEN Shuo. Research on frequency grading scanning method for surface acoustic wave temperature sensor[J]. 2016, 35(5): 28-31.
[1]郑天祥,李璐,陈硕.声表面波温度传感器频率分级扫描方法研究[J].传感器与微系统,2016,35(05):28-31. DOI： 10.13873/J.1000-9787(2016)05-0028-04.

ZHENG Tian-xiang, LI Lu, CHEN Shuo. Research on frequency grading scanning method for surface acoustic wave temperature sensor[J]. 2016, 35(5): 28-31. DOI： 10.13873/J.1000-9787(2016)05-0028-04.

摘要

针对声表面波（SAW）谐振腔体的频率响应单侧单调特征

为提高传感器的温度响应速度

提出了一种频率分级扫描方法

将频率扫描分为粗扫频和精扫频两个阶段

以不同的扫频步长依次进行。利用粗扫频确定中心谐振频率所处的频率区间

再在该频率区间内利用精扫频得到腔体中心谐振频率

可将温度传感器扫频时间降为原来的1/7。利用提出的频率扫描方法开展实验研究

分别研究了单个传感器的温度量测不确定度和多个传感器的温度量测一致性

并分析了实验结果。

Abstract

Frequency responses of surface acoustic wave（ SAW） resonators are monotonous in single side around resonant frequency

a grading scanning method is proposed to enhance response speed of SAW sensor for temperature sensing. The scanning method contains two frequency scanning levels

named as the coarse-level and the fine-level. With the method

scanning time of the SAW sensor for temperature is reduced to 1 /7. The experiments are performed to testify the effectiveness of the method. The uncertainty with a single SAW sensor and the inconsistency of multi-SAW sensors on temperature measurement are extracted by the experiments

experimental results are analyzed.

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references

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基于COMSOL的声表面波器件仿真 [J]. 阮鹏,陈智军,付大丰,张亦居,王萌阳. 测试技术学报 . 2012(05)

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GaN/Si based single SAW resonator temperature sensor operating in the GHz frequency range [J] . A. Müller,G. Konstantinidis,V. Buiculescu,A. Dinescu,A. Stavrinidis,A. Stefanescu,G. Stavrinidis,I. Giangu,A. Cismaru,A. Modoveanu. Sensors & Actuators: A. Physical . 2014

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