Three-dimensional simulation study of planar capacitive sensor array based on ANSYS

LIU Ze-liang; WEN Yin-tang; LIANG Xi; LI Hui-jian

doi:10.13873/J.1000-9787(2016)04-0045-04

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Three-dimensional simulation study of planar capacitive sensor array based on ANSYS

更新时间：2025-09-11

- Three-dimensional simulation study of planar capacitive sensor array based on ANSYS
- Vol. 35, Issue 4, Pages: 45-48(2016)
- 作者机构：
  
  1. 燕山大学建筑工程与力学学院
  2. 燕山大学电气工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2016)04-0045-04
  CLC： TP212
- Published：2016
- 稿件说明：
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[1]刘泽良,温银堂,梁希,李慧剑.基于ANSYS的平面电容传感器阵列三维仿真研究[J].传感器与微系统,2016,35(04):45-48.

LIU Ze-liang, WEN Yin-tang, LIANG Xi, et al. Three-dimensional simulation study of planar capacitive sensor array based on ANSYS[J]. 2016, 35(4): 45-48.
[1]刘泽良,温银堂,梁希,李慧剑.基于ANSYS的平面电容传感器阵列三维仿真研究[J].传感器与微系统,2016,35(04):45-48. DOI： 10.13873/J.1000-9787(2016)04-0045-04.

LIU Ze-liang, WEN Yin-tang, LIANG Xi, et al. Three-dimensional simulation study of planar capacitive sensor array based on ANSYS[J]. 2016, 35(4): 45-48. DOI： 10.13873/J.1000-9787(2016)04-0045-04.

摘要

通过电磁场有限元分析软件ANSYS

构建了电容层析成像（ECT）系统平面3×4电容传感器阵列三维模型。介绍了平面电容传感器阵列结构并分析了其测量原理。对电容进行了仿真计算。仿真与实验进行了对比

证明了仿真模拟的可行性。通过仿真计算电容值

研究了材料与电极间距和材料厚度对电容值的影响。计算了电极对长度和宽度方向的检测深度。通过ANSYS模拟

为损伤检测的特征提取和逆问题图像重构提供了仿真数据。

Abstract

Based on electromagnetic field finite element analysis software

ANSYS

a model of 3-dimensional for electrical capacitance tomography（ ECT） system 3 × 4 planar capacitive sensor array is established. Introduce structure of planar capacitive sensor array and analyze its measuring principle. Capacitance is calculated by ANSYS simulation. Compared with experiment

it is proved that simulation is feasible. Calculate capacitance value through simulation

study on effect of spacing between material and electrode and thickness of material on capacitance value. Calculate detecting depth of electrode couple in length and width direction. ANSYS simulation provides simulation data for feature extraction of damage detection and inverse problem image reconstruction.

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Keywords

references

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同面多电极电容传感器结构仿真研究 [J]. 曹河,董恩生,范作宪,庞宇. 传感器与微系统 . 2012(12)

平面式电容传感器阵列激励模式研究 [J]. 王挺,范文茹,郝魁红,王化祥. 传感器与微系统 . 2012(09)

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电容层析成像系统三维电场分析及阵列电极优化 [J]. 张雪辉,王化祥,问雪宁. 天津大学学报 . 2007(09)

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基于ANSYS的ECT系统传感器电容值的仿真研究 [J]. 杨玉兰,黄民. 电子测量技术 . 2007(03)

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