Design of time-grating displacement sensor based on light field coupling

CHANG Chi; ZHU Ge; FU Min; JIANG Lin-yan

doi:10.13873/J.1000-9787(2016)02-0113-03

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Design of time-grating displacement sensor based on light field coupling

更新时间：2025-09-11

- Design of time-grating displacement sensor based on light field coupling
- Vol. 35, Issue 2, Pages: 113-115+119(2016)
- 作者机构：
  
  重庆理工大学机械检测技术与装备教育部工程研究中心时栅传感及先进检测技术重庆市重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2016)02-0113-03
  CLC： TP212
- Published：2016
- 稿件说明：
移动端阅览
[1]昌驰,朱革,付敏,姜林言.基于光场耦合的时栅位移传感器设计[J].传感器与微系统,2016,35(02):113-115+119.

CHANG Chi, ZHU Ge, FU Min, et al. Design of time-grating displacement sensor based on light field coupling[J]. 2016, 35(2): 113-115+119.
[1]昌驰,朱革,付敏,姜林言.基于光场耦合的时栅位移传感器设计[J].传感器与微系统,2016,35(02):113-115+119. DOI： 10.13873/J.1000-9787(2016)02-0113-03.

CHANG Chi, ZHU Ge, FU Min, et al. Design of time-grating displacement sensor based on light field coupling[J]. 2016, 35(2): 113-115+119. DOI： 10.13873/J.1000-9787(2016)02-0113-03.

摘要

为了实现制造成本低、易加工、高精度的位移测量

设计了一种光场耦合式的时栅位移传感器。介绍了利用基于交变光场的两路驻波合成电行波信号

并通过鉴相的方式实现空间位移转换的测量原理;完成了传感器的结构设计

给出了传感器的系统框图

具体分析了信号处理电路的功能。实验结果表明:光场耦合式的时栅位移传感器在108 mm范围内误差为±0.5μm。

Abstract

In order to achieve displacement measurement of low cost

easy processing and high-precision

timegrating displacement sensor of light field coupling is designed. The measurement principle of displacement sensor

which uses electric standing waves based on alternating light field to synthesize electric traveling wave signal

and achieves spatial displacement conversion by means of phase discrimination

is illustrated; structural design of sensor is completed

system block diagram is given and function of signal processing circuit is specifically analyzed. Experimental results show that measurement error of time-grating displacement sensor of light field coupling can reach to ± 0. 5 μm at range of 108 mm.

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references

直线时栅传感器全误差模型与误差修正方法研究 [J]. 高忠华,陈锡侯,杨继森,彭东林. 传感器与微系统 . 2012(08)

超精密加工领域科学技术发展研究 [J]. 袁巨龙,张飞虎,戴一帆,康仁科,杨辉,吕冰海. 机械工程学报 . 2010(15)

机械制造领域测量技术的发展研究 [J]. 裘祖荣,石照耀,李岩. 机械工程学报 . 2010(14)

基于激光技术的亚纳米级位移测量系统的研究 [J]. 曲兴华,王丽华. 仪器仪表学报 . 2010(06)

论纳米光栅测量技术 [J]. 邹自强. 纳米技术与精密工程 . 2004(01)

时空坐标转换理论与时栅位移传感器研究 [J]. 彭东林,刘成康,谭为民. 仪器仪表学报 . 2000(04)

时栅位移传感器与新型机床动态检测系统[M]. 科学出版社 , 彭东林, 2009

A review of nanometer resolution position sensors: Operation and performance [J] . Andrew J. Fleming. Sensors & Actuators: A. Physical . 2013

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