Design of high temperature pressure sensor based on no-co-fired technology

DAI Xiao-yan; YANG Ming-liang

doi:10.13873/J.1000-9787(2016)02-0094-03

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Design of high temperature pressure sensor based on no-co-fired technology

更新时间：2025-09-11

- Design of high temperature pressure sensor based on no-co-fired technology
- Vol. 35, Issue 2, Pages: 94-96(2016)
- 作者机构：
  
  1. 中北大学仪器与电子学院
  2. 中北大学电子测试技术国家重点实验室
  3. 中北大学仪器科学与动态测试教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2016)02-0094-03
  CLC： TP212.1
- Published：2016
- 稿件说明：
移动端阅览
[1]戴萧嫣,杨明亮.基于非共烧技术的高温压力传感器设计[J].传感器与微系统,2016,35(02):94-96.

DAI Xiao-yan, YANG Ming-liang. Design of high temperature pressure sensor based on no-co-fired technology[J]. 2016, 35(2): 94-96.
[1]戴萧嫣,杨明亮.基于非共烧技术的高温压力传感器设计[J].传感器与微系统,2016,35(02):94-96. DOI： 10.13873/J.1000-9787(2016)02-0094-03.

DAI Xiao-yan, YANG Ming-liang. Design of high temperature pressure sensor based on no-co-fired technology[J]. 2016, 35(2): 94-96. DOI： 10.13873/J.1000-9787(2016)02-0094-03.

摘要

设计一种基于氧化锆（Zr O2）的高温非共烧陶瓷压力传感器。在已有的低温共烧陶瓷（LTCC）工艺的基础上

经过改进采用了高温非共烧技术进行陶瓷传感器的制作。先进行传感器基底的制作

再制作传感器的金属电路部分。这样解决了高温共烧技术中各材料高温烧结热膨胀系数不匹配的问题。传感器信号读取采用两个电感耦合的方式

实现了非接触压力测量。制作的传感器高温环境下力学特性稳定。测试结果显示:传感器的谐振频率随外加压力的增加而减小

其谐振频率变化对压力的响应灵敏度约为491.10 k Hz/bar。

Abstract

A high temperature no-co-fired ceramic pressure sensor based on Zirconia（ Zr O2） is designed. Based on the existing low temperature co-fired ceramic（ LTCC） process

the improved high-temperature no-co-fired technology is used to fabricate ceramic sensor. That is to say that the sensor substrate is firstly fabricated

and then the metallic circuit of the sensor is realized. The proposed method solves the problems of thermal expansion coefficient mismatch of high-temperature sintering materials. Read-out of sensor signals use two inductive coupling methods

which enables non-contact pressure measurement. The fabricated sensor has pretty stable mechanical properties under high temperatures. The results show that the resonance frequency of sensor decreases with the increase of pressure

its response sensitivity of the resonance frequency to pressure is about 491. 10 k Hz / bar.

关键词

Keywords

references

Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology [J]. Ji-jun XIONG,Shi-jun ZHENG,Ying-ping HONG,Jun LI,Ying-lin WANG,Wei WANG,Qiu-lin TAN. Journal of Zhejiang University-Science C（Computers & Electronics） . 2013(04)

Wireless LTCC-based capacitive pressure sensor for harsh environment [J] . Jijun Xiong,Ying Li,Yingping Hong,Binzhen Zhang,Tianhong Cui,Qiulin Tan,Shijun Zheng,Ting Liang. Sensors & Actuators: A. Physical . 2013

A novel high temperature pressure sensor on the basis of SOI layers [J] . Zhao Yulong,Zhao Libo,Jiang Zhuangde. Sensors & Actuators: A. Physical . 2003 (1)

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