Analysis and fabrication of a nano-fiber piezoelectric pressure sensor

ZHANG Jiu-chao; TAN Xiao-lan; KANG Jie

doi:10.13873/J.1000-9787(2016)01-0124-03

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Analysis and fabrication of a nano-fiber piezoelectric pressure sensor

更新时间：2025-09-11

- Analysis and fabrication of a nano-fiber piezoelectric pressure sensor
- Vol. 35, Issue 1, Pages: 124-126+130(2016)
- 作者机构：
  
  北方工业大学机械与材料工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2016)01-0124-03
  CLC： TP212
- Published：2016
- 稿件说明：
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[1]张久超,谭晓兰,康杰.一种纳米纤维压电式压力传感器的分析与制作[J].传感器与微系统,2016,35(01):124-126+130.

ZHANG Jiu-chao, TAN Xiao-lan, KANG Jie. Analysis and fabrication of a nano-fiber piezoelectric pressure sensor[J]. 2016, 35(1): 124-126+130.
[1]张久超,谭晓兰,康杰.一种纳米纤维压电式压力传感器的分析与制作[J].传感器与微系统,2016,35(01):124-126+130. DOI： 10.13873/J.1000-9787(2016)01-0124-03.

ZHANG Jiu-chao, TAN Xiao-lan, KANG Jie. Analysis and fabrication of a nano-fiber piezoelectric pressure sensor[J]. 2016, 35(1): 124-126+130. DOI： 10.13873/J.1000-9787(2016)01-0124-03.

摘要

为研究多铁纳米纤维在压力传感器上的应用

基于多铁纳米纤维敏感材料

利用MEMS技术、静电纺丝技术

设计制作了一种压电式压力传感器。通过对单根纳米纤维压电特性的有限元分析

得出纳米纤维直径越小

长度越大

即电极间距越大

纤维端电势越高

灵敏度越好。设计了传感器的结构尺寸和工艺过程

制作出了传感器样片。分析了在深硅刻蚀中掩蔽层保护出现的问题

提出了可行的工艺方法。

Abstract

In order to study application of multiferroic nano-fiber in pressure sensor

a piezoelectric pressure sensor based on sensitive materials of multiferroic nano-fibers is designed by using micro-electro-mechanicalsystems（ MEMS） technology and electrospinning technology. Piezoelectric properties of single nano-fiber are analyzed by finite element analysis software

and it is derived that the smaller the diameter of nano-fibers is

and the longer the length is

that is

the larger distance between electrodes is

the higher the potential at fiber end and the sensitivity are. The structure size and process flow of sensor are designed

and then a sample sensor is fabricated. The masking layer protection problems are analyzed during deep silicon etching

feasible process is proposed.

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references

一种基于多铁压电纳米纤维压力传感器设计 [J]. 汪海涛,谭晓兰,李佳玮. 传感器与微系统 . 2014(09)

基于有限元法压电纤维复合物结构的模拟优化 [J]. 林秀娟,张斗,张晓泳,李志友,周科朝. 中国有色金属学报 . 2012(06)

一种硅微压阻式压力传感器的研究 [J]. 刘珍妮,谭晓兰,杨峻松. 机械设计与制造 . 2012(01)

一种新型微机械谐振式压力传感器研究 [J]. 史晓晶,陈德勇,王军波,毋正伟,刘磊. 传感技术学报 . 2009(06)

硅的反应离子刻蚀工艺参数研究 [J]. 葛益娴,王鸣,戎华. 南京师范大学学报(工程技术版) . 2006(03)

多重铁性微纳米材料的制备与表征 [D]. 谢淑红. 湘潭大学 2008

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Related Institution

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