Environmental temperature has significant effect on detection precision of silicon micro accelerometer

and ultimately affect precision of navigation system. So accurately calibrate environmental temperature effect on operational performance of micro accelerometer

and establish temperature compensating model

which is crucial for practical engineering application. At- 20

60 ℃ temperature range

obtain zero-bias and scale factor of micro accelerometer by experiment

and use linear fitting and Lorentz curve fitting to construct the temperature compensation model. The latter increase stability of measurement result about one order of magnitude

which has good practical application value.