Mounting technology of piezoelectric micromachined modal gyroscope

WEI Nian; WU Xiao-sheng; LIU Wu; CHEN Wen-yuan; CUI Feng; ZHANG Wei-ping

doi:10.13873/J.1000-9787(2015)10-0041-03

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Mounting technology of piezoelectric micromachined modal gyroscope

更新时间：2025-09-11

- Mounting technology of piezoelectric micromachined modal gyroscope
- Vol. 34, Issue 10, Pages: 41-43+53(2015)
- 作者机构：
  
  上海交通大学微纳科学技术研究院
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2015)10-0041-03
  CLC： TH82;TP212
- Published：2015
- 稿件说明：
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[1]韦念,吴校生,刘武,陈文元,崔峰,张卫平.压电微固体模态陀螺的安装技术[J].传感器与微系统,2015,34(10):41-43+53.

WEI Nian, WU Xiao-sheng, LIU Wu, et al. Mounting technology of piezoelectric micromachined modal gyroscope[J]. 2015, 34(10): 41-43+53.
[1]韦念,吴校生,刘武,陈文元,崔峰,张卫平.压电微固体模态陀螺的安装技术[J].传感器与微系统,2015,34(10):41-43+53. DOI： 10.13873/J.1000-9787(2015)10-0041-03.

WEI Nian, WU Xiao-sheng, LIU Wu, et al. Mounting technology of piezoelectric micromachined modal gyroscope[J]. 2015, 34(10): 41-43+53. DOI： 10.13873/J.1000-9787(2015)10-0041-03.

摘要

压电微固体模态陀螺（PMMG）利用压电PZT长方体的某高阶共振模态作为参考振动

是一种抗冲击、抗震动能力强的新型全固态陀螺。获得优化的参考振动振型对提高陀螺性能至关重要

但是大多数文献都没有涉及到封装对参考振动的影响。利用有限元方法（FEM）分析了压电振子安装时支撑点位置与接触面积对参考振动的影响

分析结果表明:相对于接触面积的变化

支撑点位置的变化对陀螺参考模态的影响更大。该研究结果为压电微固体模态陀螺的安装方法提供了理论基础。

Abstract

Piezoelectric micromachined modal gyroscope（ PMMG） is a novel type of all-solid state gyroscope

which utilizes the high-order resonance mode of the PZT body as its reference vibration and thus obtain excellent properties of anti-shock and anti-vibration. Obtain the optimized reference vibration mode is essential to improve the performance of the gyroscope

but most papers didn’t cover the influence of packaging on reference vibration.Influence of supporting point position and contact area in installing of piezoelectric vibrator on reference vibration is analyzed by finite element method（ FEM）

and analysis results show that the variation of supporting point position has a greater impact on reference vibration mode of gyro compared with the variation of contact area. The research provides theoretical bisis for mounting method of PMMG.

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references

Does greater piezo-resistive transduction give rise to higher anchor loss in a square-extensional mode micromechanical resonator? [J] . Yuanjie Xu,Joshua E.-Y. Lee. Sensors & Actuators: A. Physical . 2013

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