Study on chemical sensing detection method for Si-based micro-ring resonator

LEI Long-hai; TANG Jun; ZHANG Tian-en; GUO Hao; LIU Jun

doi:10.13873/J.1000-9787(2015)10-0032-03

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Study on chemical sensing detection method for Si-based micro-ring resonator

更新时间：2025-09-11

- Study on chemical sensing detection method for Si-based micro-ring resonator
- Vol. 34, Issue 10, Pages: 32-34+47(2015)
- 作者机构：
  
  1. 中北大学仪器科学与动态测试教育部重点实验室
  2. 中北大学电子测试技术国家重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2015)10-0032-03
  CLC： TN252;TP212
- Published：2015
- 稿件说明：
移动端阅览
[1]雷龙海,唐军,张天恩,郭浩,刘俊.Si基微环谐振腔化学传感检测方法研究[J].传感器与微系统,2015,34(10):32-34+47.

LEI Long-hai, TANG Jun, ZHANG Tian-en, et al. Study on chemical sensing detection method for Si-based micro-ring resonator[J]. 2015, 34(10): 32-34+47.
[1]雷龙海,唐军,张天恩,郭浩,刘俊.Si基微环谐振腔化学传感检测方法研究[J].传感器与微系统,2015,34(10):32-34+47. DOI： 10.13873/J.1000-9787(2015)10-0032-03.

LEI Long-hai, TANG Jun, ZHANG Tian-en, et al. Study on chemical sensing detection method for Si-based micro-ring resonator[J]. 2015, 34(10): 32-34+47. DOI： 10.13873/J.1000-9787(2015)10-0032-03.

摘要

提出了一种非标记光化学传感检测方法:光波导谐振谱检测

通过感应环形波导表面有效折射率变化进行化学传感;理论分析

并结合光学测试系统

利用此方法实现了微环谐振腔结构对Na Cl离子、结晶紫分子溶液的在线浓度测量

实验得到:其检测灵敏度分别达181.47 pm/10-2

227 nm/（mol·L-1）

证明了该方法可以应用于化学溶液检测领域。

Abstract

A label-free optical waveguide resonance spectroscopy chemical sensing detection method via inducing the change of effective refractive index of the surface of waveguide based on micro-ring resonator is presented.Through theoretical analysis and optical test system

using this method realizes measurement of the concentration of Na Cl and crystal violet solution. The detection sensitivity of 181. 47 pm /10- 2and 227 nm /（ mol·L- 1）

respectively

are achieved experimentally

which proves this method can be applied in the field of chemical solution detection.

关键词

Keywords

references

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Biosensing by optical waveguide spectroscopy based on localized surface plasmon resonance of gold nanoparticles used as a probe or as a label [J] . Mayuki Kajiura,Takuya Nakanishi,Hironori Iida,Harumi Takada,Tetsuya Osaka. Journal of Colloid And Interface Science . 2009 (1)

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