Design of a push-pull driving micro-magnetic sensor

XU Hua-ying; XU De-hui; XIONG Bin; BI Qin; WANG Dong-ping

doi:10.13873/J.1000-9787(2015)09-0094-03

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Design of a push-pull driving micro-magnetic sensor

更新时间：2025-09-11

- Design of a push-pull driving micro-magnetic sensor
- Vol. 34, Issue 9, Pages: 94-96(2015)
- 作者机构：
  
  1. 中国科学院上海微系统与信息技术研究所
  2. 上海芯敏微系统技术有限公司
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2015)09-0094-03
  CLC： TP212
- Published：2015
- 稿件说明：
移动端阅览
[1]徐华英,徐德辉,熊斌,毕勤,王东平.一种推挽驱动的微型磁传感器设计[J].传感器与微系统,2015,34(09):94-96.

XU Hua-ying, XU De-hui, XIONG Bin, et al. Design of a push-pull driving micro-magnetic sensor[J]. 2015, 34(9): 94-96.
[1]徐华英,徐德辉,熊斌,毕勤,王东平.一种推挽驱动的微型磁传感器设计[J].传感器与微系统,2015,34(09):94-96. DOI： 10.13873/J.1000-9787(2015)09-0094-03.

XU Hua-ying, XU De-hui, XIONG Bin, et al. Design of a push-pull driving micro-magnetic sensor[J]. 2015, 34(9): 94-96. DOI： 10.13873/J.1000-9787(2015)09-0094-03.

摘要

利用MEMS工艺

设计并制作了一种梳齿推挽驱动的微型磁场传感器。在器件工作时

磁传感器的谐振振子工作在收缩或扩张的模态

进而引起谐振振子上的双层铝线圈包围面积发生变化

即回路线圈中的磁通量发生变化。根据电磁感应原理

将会在线圈的两端产生正比于磁场强度的感应电压。推挽驱动结构设计增加了谐振器驱动力

提高了磁传感器的灵敏度。实验结果表明:磁传感器在大气环境下的灵敏度为0.846 99 m V/T

非线性度为-0.265%。由于传感器采用差分检测电路

减小了磁传感器的零偏电压

零偏输出电压仅为0.001 9 m V。

Abstract

Based on the MEMS technology

a comb-shaped push-pull driving micro-magnetic sensor is designed and fabricated. When measuring the external magnetic field

the resonator of sensor works in contracting and extensional modal

therefore the surrounding area by double-layer Al coils will change

as a result

magnetic flux in loop coils vary. According to the principle of electromagnetic induction

induced electromotive force will generate proportional to magnetic field at the two terminals of the coils. The experimental results show that the sensitivity of magnetic sensor in air environment is 0. 846 99 m V / T

and the nonlinearity is-0. 265 %. Using the differential circuit

reduce the zero offset voltage of magnetic sensor

which is only 0. 001 9 m V.

关键词

Keywords

references

Methods for enhanced electrical transduction and characterization of micromechanical resonators [J] . A.T-H. Lin,J.E-Y. Lee,J. Yan,A.A. Seshia. Sensors & Actuators: A. Physical . 2010 (2)

Nonlinearities in a high- Q SOI Lamé-mode bulk resonator [J] . L C Shao,T Niu,M Palaniapan. Journal of Micromechanics and Microengineering . 2009 (7)

Equivalent-circuit model of the squeezed gas film in a silicon accelerometer [J] . Sensors & Actuators: A. Physical . 1995 (3)

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