Broadband MEMS vector hydrophone based on Parylene encapsulation

WANG Ren-xin; LIU Yuan; ZHANG Guo-jun; LIU Jun; XUE Chen-yang; ZHANG Wen-dong

doi:10.13873/J.1000-9787(2015)08-0016-03

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Broadband MEMS vector hydrophone based on Parylene encapsulation

更新时间：2025-09-11

- Broadband MEMS vector hydrophone based on Parylene encapsulation
- Vol. 34, Issue 8, Pages: 16-18(2015)
- 作者机构：
  
  1. 仪器科学与动态测试教育部重点实验室中北大学
  2. 电子测试技术重点实验室中北大学
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2015)08-0016-03
  CLC： TB565.1
- Published：2015
- 稿件说明：
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[1]王任鑫,刘源,张国军,刘俊,薛晨阳,张文栋.基于Parylene封装的宽频带MEMS矢量水听器[J].传感器与微系统,2015,34(08):16-18.

WANG Ren-xin, LIU Yuan, ZHANG Guo-jun, et al. Broadband MEMS vector hydrophone based on Parylene encapsulation[J]. 2015, 34(8): 16-18.
[1]王任鑫,刘源,张国军,刘俊,薛晨阳,张文栋.基于Parylene封装的宽频带MEMS矢量水听器[J].传感器与微系统,2015,34(08):16-18. DOI： 10.13873/J.1000-9787(2015)08-0016-03.

WANG Ren-xin, LIU Yuan, ZHANG Guo-jun, et al. Broadband MEMS vector hydrophone based on Parylene encapsulation[J]. 2015, 34(8): 16-18. DOI： 10.13873/J.1000-9787(2015)08-0016-03.

摘要

针对目前水听器的聚氨酯封装所导致的窄频带问题

提出一种新的高疏水Parylene薄膜无透声帽封装矢量水听器

即利用Parylene薄膜的淀积高保形性、低渗透性和高绝缘性实现无透声帽封装

解决透声帽带来共振峰引入问题

拓宽水听器的频带。实验结果表明:水听器的共振峰由450 Hz提高到了1 400 Hz。

Abstract

Aiming at problem of narrow bandwidth caused by Polyurethane encapsulation of vector hydrophone

propose a kind of Parylene encapsulation

using properties of high shape preserving

low permeability and high insulation that Parylene membrane has

to realize sound transparent capless encapsulation and solve the problem of resonant peak introducing caused by sound transparent

broaden frequency band. Tests show that resonance frequency is increased from 450 Hz to 1 400 Hz.

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references

Characterization and modeling of a piezoresistive three-axial force micro sensor [J] . N. Alcheikh,C. Coutier,S. Giroud,C. Poulain,P. Rey. Sensors & Actuators: A. Physical . 2013

A fingertip force sensor for underwater dexterous hand [J] . Hua Wang. Journal of Mechanical Science and Technology . 2012 (2)

Improvement of the MEMS bionic vector hydrophone [J] . Zhang Guojun,Wang Panpan,Guan Linggang,Xiong Jijun,Zhang Wendong. Microelectronics Journal . 2011 (5)

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