Research and fabrication of NiCrAlY thin-film strain gauges

ZHANG Jie; YANG Xiao-dong; JIANG Shu-wen; JIANG Hong-chuan; ZHAO Xiao-hui; ZHANG Wan-li

doi:10.13873/J.1000-9787(2015)04-0105-03

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Research and fabrication of NiCrAlY thin-film strain gauges

更新时间：2025-09-11

- Research and fabrication of NiCrAlY thin-film strain gauges
- Vol. 34, Issue 4, Pages: 105-107(2015)
- 作者机构：
  
  电子科技大学电子薄膜与集成器件国家重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2015)04-0105-03
  CLC： TH823.3
- Published：2015
- 稿件说明：
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[1]张洁,杨晓东,蒋书文,蒋洪川,赵晓辉,张万里.NiCrAlY薄膜应变计的研制[J].传感器与微系统,2015,34(04):105-107.

ZHANG Jie, YANG Xiao-dong, JIANG Shu-wen, et al. Research and fabrication of NiCrAlY thin-film strain gauges[J]. 2015, 34(4): 105-107.
[1]张洁,杨晓东,蒋书文,蒋洪川,赵晓辉,张万里.NiCrAlY薄膜应变计的研制[J].传感器与微系统,2015,34(04):105-107. DOI： 10.13873/J.1000-9787(2015)04-0105-03.

ZHANG Jie, YANG Xiao-dong, JIANG Shu-wen, et al. Research and fabrication of NiCrAlY thin-film strain gauges[J]. 2015, 34(4): 105-107. DOI： 10.13873/J.1000-9787(2015)04-0105-03.

摘要

采用射频磁控溅射法在Ni基高温合金拉伸件上制备Ni Cr Al Y薄膜应变计。研究了热稳定处理对Ni Cr Al Y薄膜结构、表面形貌的影响

并且测试了Ni Cr Al Y薄膜应变计的电学与应变性能。结果表明:热稳定处理后Ni Cr Al Y薄膜应变计由于在表面形成了一层Al2O3膜

具有抗高温氧化的特性

在室温

00℃范围内

应变计电阻同温度呈线性变化

电阻温度系数（TCR）约为290×10-6/℃

室温下的应变计系数（GF）为2.1。

Abstract

Ni Cr Al Y thin film strain gauges are deposited on the nickel-based superalloy by radio-frequency magnetron sputtering. The effects of stabilized heat treatment at 1 000 ℃ on structure and surface morphology of Ni Cr Al Y thin films are investigated and the electromechanical properties of Ni Cr Al Y thin film strain gauges are measured. After stabilized heat treatment at 1 000 ℃

a layer of Al2O3 is formed on the surface of Ni Cr Al Y thin film

which is important cause for excellent high-temperature oxidation resistance. The variation of strain gauge resistance with temperature is linear in the temperature range from room temperature to 800 ℃. The temperature coefficient of resistance（ TCR） is about 290 × 10-6/ ℃

and gauge factor（ GF） is about 2. 1 at room temperature.

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references

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