A vibration monitoring system of wafer transmission is designed. Taking the MEMS capacitive acceleration sensor as test vector to collect vibration data

and the Bluetooth wireless sensor networks（ WSNs） is used to transmit the signal data to host computer

on monitoring computer

data processing and real-time display can be completed. The MEMS sensor can meet the light load test requirement of wafer transmission process

and using of the Bluetooth mode can avoid drawbacks of complex wiring

high cost in vibration monitoring system. With the help of the vibration system

online real-time supervision of wafer transmission in semiconductor factory can be realized

and the breakdown can be detected early.