The scheme for fabricating high-performance low temperature Co-fired ceramic（ LTCC） passive hightemperature pressure sensor which has its structure without vent hole through optimizing the sintering curve is studied herein. The optimized sintering curve is successfully achieved by comparative test. Because there is no need for sealing the proposed sensor without vent hole by glass slurry. Comparing with the conventional LTCC pressure sensor

reliability of the proposed sensor can be guaranteed owing to that the seal failure of the sensor caused by the mismatch of thermal expansivity of two kinds of materials can be avoided. Measurement results demonstrate that the fabricated sensor has considerable sensitivity and linearity within the temperature of 400 ℃and the pressure of 2. 0 bar. The sensor has the maximum average sensitivity of 1. 96 MHz / bar and the maximum linearity error of 4. 52 %

which are better than the research level in borne and abroad.