Research on measurement error while workpiece surface is inclining by laser triangulation

LI Dong-dong; WANG Yong-qiang; XU Zeng-pu; ZHOU Cong-ling

doi:10.13873/J.1000-9787(2015)02-0028-02

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Research on measurement error while workpiece surface is inclining by laser triangulation

更新时间：2025-09-11

- Research on measurement error while workpiece surface is inclining by laser triangulation
- Vol. 34, Issue 2, Pages: 28-29+36(2015)
- 作者机构：
  
  天津科技大学机械工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2015)02-0028-02
  CLC： TP212
- Published：2015
- 稿件说明：
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[1]李冬冬,王永强,许增朴,周聪玲.激光三角法在物面倾斜时的测量误差研究[J].传感器与微系统,2015,34(02):28-29+36.

LI Dong-dong, WANG Yong-qiang, XU Zeng-pu, et al. Research on measurement error while workpiece surface is inclining by laser triangulation[J]. 2015, 34(2): 28-29+36.
[1]李冬冬,王永强,许增朴,周聪玲.激光三角法在物面倾斜时的测量误差研究[J].传感器与微系统,2015,34(02):28-29+36. DOI： 10.13873/J.1000-9787(2015)02-0028-02.

LI Dong-dong, WANG Yong-qiang, XU Zeng-pu, et al. Research on measurement error while workpiece surface is inclining by laser triangulation[J]. 2015, 34(2): 28-29+36. DOI： 10.13873/J.1000-9787(2015)02-0028-02.

摘要

相比传统的触针式测量

激光位移传感器因其高精度和非接触式测量的优点

在机械工程中已广泛使用。鉴于激光三角法的设计原理

当工件产生倾斜角时

激光位移传感器会产生误差。通过激光位移传感器、精密电移台、精密旋转台构建了实验测量系统

对测量数据使用Matlab进行分析

所用电移台的重复精度小于5μm

测得了不同倾斜角度下激光传感器的误差

用最小二乘法拟合进行了误差补偿。实验证明:误差标定后

激光传感器在测量倾斜物面时仍能保证高精度。

Abstract

Compared with traditional touch measurement

laser displacement sensor has been widely used in mechanical engineering for its high precision and property of non-contact measurement. According to design principle of laser triangulation

laser displacement sensor will produce errors when there is a slant angle over the workpiece. To solve this problem

build an experimental measurement system by using a laser displacement sensor

a precise electric displacement platform and precise rotary platform; analyze measurement datas by Matlab;repeatability of electric displacement platform is less than 5 μm obtain errors under different slant angles

and employ least squares fitting for error compensation. Experiment verify that laser displacement sensor can still ensure high precision in measuring inclined plane of objects with slant angles after error calibration.

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references

激光三角法测量中被测物表面特性对测量精度影响的分析 [J]. 周坤,季海焦,刘海滨. 光学与光电技术 . 2009(02)

高精度激光三角位移传感器的技术现状 [J]. 冯俊艳,冯其波,匡萃方. 应用光学 . 2004(03)

激光三角法测量误差分析与精度提高研究 [J]. 吴剑锋,王文,陈子辰. 机电工程 . 2003(05)

三角法激光测量系统的误差分析及消除方法 [J]. 黄战华,蔡怀宇,李贺桥,张以谟. 光电工程 . 2002(03)

激光扫描三角法大型曲面测量中影响参数分析 [J]. 杨耀权,施仁,于希宁,高镗年. 西安交通大学学报 . 1999(07)

基于视觉引导的激光齿轮倒角测量系统研究 [D]. 蔡春明. 天津科技大学 2013

基于光散射的三角法测量技术的研究 [D]. 金洪禹. 哈尔滨工业大学 2006

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