Research of array MEMS vector hydrophone with four units on a chip

JIAN Ze-ming; CHEN Shang; ZHANG Guo-jun; LIU Meng-ran; XU Jiao; ZHANG Wen-dong

doi:10.13873/J.1000-9787(2015)01-0009-04

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Research of array MEMS vector hydrophone with four units on a chip

更新时间：2025-09-11

- Research of array MEMS vector hydrophone with four units on a chip
- Vol. 34, Issue 1, Pages: 9-12+16(2015)
- 作者机构：
  
  1. 中北大学仪器科学与动态测试教育部重点实验室
  2. 中北大学电子测试技术重点实验室
  3. 中国运载火箭技术研究院研究发展中心
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2015)01-0009-04
  CLC： TB565.1
- Published：2015
- 稿件说明：
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[1]简泽明,陈尚,张国军,刘梦然,许娇,张文栋.单片集成四元阵列式MEMS矢量水听器的研究[J].传感器与微系统,2015,34(01):9-12+16.

JIAN Ze-ming, CHEN Shang, ZHANG Guo-jun, et al. Research of array MEMS vector hydrophone with four units on a chip[J]. 2015, 34(1): 9-12+16.
[1]简泽明,陈尚,张国军,刘梦然,许娇,张文栋.单片集成四元阵列式MEMS矢量水听器的研究[J].传感器与微系统,2015,34(01):9-12+16. DOI： 10.13873/J.1000-9787(2015)01-0009-04.

JIAN Ze-ming, CHEN Shang, ZHANG Guo-jun, et al. Research of array MEMS vector hydrophone with four units on a chip[J]. 2015, 34(1): 9-12+16. DOI： 10.13873/J.1000-9787(2015)01-0009-04.

摘要

针对当前对MEMS矢量水听器高可靠性迫切要求

设计了2×2单片集成四元阵列式MEMS矢量水听器

以保证其中一个敏感微结构失效损坏或工作不正常时

水听器仍能正常工作。结合ANSYS软件对阵列敏感微结构进行了仿真分析;设计了该微结构的加工工艺流程;最后

对阵列式MEMS矢量水听器进行水声校准测试。测试结果表明:阵列式水听器可靠性明显提高

灵敏度达到-179 d B（0 d B=1V/μPa）

具有良好的"8"字指向性。

Abstract

Introduce a kind of 2 × 2 array MEMS vector hydrophone with four units on a chip

which is designed to meet urgent demand of higher reliability of MEMS vector hydrophone

to ensure when one of the sensitive microstructure is damaged or doesn’t work properly

the hydrophone can still work well. The microstructure of the hydrophone is simulated by ANSYS; then

microstructure machining process is designed; array MEMS vector hydrophone is measured by underwater standing wave field. Test results show that reliability of hydrophone is improved significantly and sensitivity of hydrophone is- 179 d B（ 0 d B = 1V / μPa）

possessing a good directional pattern in the form of "8"shape.

关键词

Keywords

references

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