Fifth-order MFLR digital closed-loop control system of MEMS accelerometer based on ∑-△M

DU Song-jie; YUAN Wei-zheng; CHEN Fang; CHANG Hong-long

doi:10.13873/J.1000-9787(2014)12-0120-04

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Fifth-order MFLR digital closed-loop control system of MEMS accelerometer based on ∑-△M

更新时间：2025-09-11

- Fifth-order MFLR digital closed-loop control system of MEMS accelerometer based on ∑-△M
- Vol. 33, Issue 12, Pages: 120-123(2014)
- 作者机构：
  
  西北工业大学空天微纳系统教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2014)12-0120-04
  CLC： TH824.4;TP273
- Published：2014
- 稿件说明：
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[1]杜松杰,苑伟政,陈方,常洪龙.基于∑-△M的五阶MFLR数字微加速度计闭环控制系统[J].传感器与微系统,2014,33(12):120-123.

DU Song-jie, YUAN Wei-zheng, CHEN Fang, et al. Fifth-order MFLR digital closed-loop control system of MEMS accelerometer based on ∑-△M[J]. 2014, 33(12): 120-123.
[1]杜松杰,苑伟政,陈方,常洪龙.基于∑-△M的五阶MFLR数字微加速度计闭环控制系统[J].传感器与微系统,2014,33(12):120-123. DOI： 10.13873/J.1000-9787(2014)12-0120-04.

DU Song-jie, YUAN Wei-zheng, CHEN Fang, et al. Fifth-order MFLR digital closed-loop control system of MEMS accelerometer based on ∑-△M[J]. 2014, 33(12): 120-123. DOI： 10.13873/J.1000-9787(2014)12-0120-04.

摘要

为了进一步抑制加速度计信号带宽范围内的噪声

提出并设计了一种基于Σ-△M的五阶多反馈谐振式（MFLR）微机械加速度计闭环控制系统

该系统通过增加额外的内部负反馈对量化噪声进行再一次整形。微机械加速度计结构为一种全差分式结构

在结构层厚度为60μm、基底层厚度为400μm的SOI硅片上

经过光刻、溅射、深度反应离子刻蚀等工艺步骤加工而成。整个闭环控制系统的Matlab/Simulink模型首先被建立

然后采用"单位圆分析法"进行系统参数的设定

系统仿真显示:当输入幅值1g

、频率128Hz的加速度信号时

加速度计的噪声为-136.2 dB

与传统五阶MF结构的∑-△M闭环控制系统相比

在0

00 Hz信号带宽范围内的噪声降低了7.9dB。最后整个系统在四层PCB电路板上进行了功能性验证和测试。

Abstract

In order to further depress noise in signal bandwidth

a fifth-order MEMS accelerometer closed-loop control system based on Sigma-Delta modulator（∑-△M） with multi-feedback loops and resonators（MFLR） is proposed

this system through adding additional local feedback to shape the quantization noise structure of MEMS accelerometer is fully differential structure which is manufactured on SOI wafer with structure layer thickness of60 μm and substrate layer thickness of 400 μm

manufacturing procedure includes lithography

sputtering

deep reactive ion etching

etc.Matlab/Simulink model of overall closed-loop control system

is firstly set up

then

system parameters are set by unit circle analysis method.System simulation show that power spectral density（PSD）simulation of the system is derived.The amplitude of input is 1 g

and frequency of signal is 128 Hz

noise is—136.2 dB which is 7.9 dB lower than traditional 5 th-order closed-loop control system based on ∑-△M with MF topology

at range signal bandwidth of 0

00 Hz.A four-layer printed circuit board（PCB） prototype of this system is built to validate functionality of the system and tested.

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Keywords

references

Continuous-time interface for a micromachined capacitive accelerometer with NEA of 4 μ g and bandwidth of 300 Hz [J] . Lasse Aaltonen,Kari Halonen. Sensors & Actuators: A. Physical . 2009 (1)

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