A high efficient method for calibration and compensation of digital air pressure sensor

LI Liang; DU Li-dong; ZHAO Zhan; WEI Ke-jing

doi:10.13873/J.1000-9787(2014)11-0044-04

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A high efficient method for calibration and compensation of digital air pressure sensor

更新时间：2025-09-11

- A high efficient method for calibration and compensation of digital air pressure sensor
- Vol. 33, Issue 11, Pages: 44-47(2014)
- 作者机构：
  
  1. 中国科学院电子学研究所传感器技术联合国家重点实验室
  2. 中国科学院大学
  3. 解放军理工大学气象海洋学院探测与装备工程教研中心
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2014)11-0044-04
  CLC： TP212
- Published：2014
- 稿件说明：
移动端阅览
[1]李亮,杜利东,赵湛,卫克晶.数字气压传感器的一种高效标定和补偿方法[J].传感器与微系统,2014,33(11):44-47.

LI Liang, DU Li-dong, ZHAO Zhan, et al. A high efficient method for calibration and compensation of digital air pressure sensor[J]. 2014, 33(11): 44-47.
[1]李亮,杜利东,赵湛,卫克晶.数字气压传感器的一种高效标定和补偿方法[J].传感器与微系统,2014,33(11):44-47. DOI： 10.13873/J.1000-9787(2014)11-0044-04.

LI Liang, DU Li-dong, ZHAO Zhan, et al. A high efficient method for calibration and compensation of digital air pressure sensor[J]. 2014, 33(11): 44-47. DOI： 10.13873/J.1000-9787(2014)11-0044-04.

摘要

硅压阻式压力传感器受制造工艺和测量环境的影响

其输出大都具有一定的非线性

其中以温度的影响最为明显。鉴于此

传感器需要准确地标定测试和温度补偿

首先制作一种带有高精度AD和微处理器的数字气压传感器

用它采集数据;然后分析测试设备

确定采用恒压变温的标定方案

它不仅效率高

而且能准确反映传感器的温度和输出特性;最后用最小二乘算法在微处理器上实现温度补偿

补偿后传感器的输出精度满足了应用需求。

Abstract

Influenced by manufacturing technology and measurement environment

especially temperature

output of Si piezo-resistive pressure sensor mostly is non-linear. So it is necessary for sensor to accurately calibrate

test and temperature compensation

firstly

fabricate a digital air pressure sensor which contains high precision AD and microprocessor to collect datas

then analyze test equipment and decide to adopt scheme of variable temperature at constant pressure. This method is very efficient and can describe features of temperature and output of sensor exactly. Finally

temperature compensation is carried out on microcontroller by least square method

output precision of sensor after compensation meet demand of application.

关键词

Keywords

references

压力传感器温度补偿各种算法的比较分析 [J]. 杨雪,刘诗斌. 电子设计工程 . 2013(10)

压力传感器温度补偿的BP神经网络算法 [J]. 张荷芳,薛静云. 西安工业大学学报 . 2013(02)

微机电系统（MEMS）硅压阻式压力传感器分析研究 [J]. 李烨,石鑫. 真空 . 2011(06)

一种压阻式微压力传感器 [J]. 李伟东,吴学忠,李圣怡. 仪表技术与传感器 . 2006(07)

高精度气象压力传感器技术研究 [D]. 唐胜武. 哈尔滨工程大学 2011

传感器技术及应用[M]. 北京航空航天大学出版社 , 樊尚春编著, 2004

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