A model analytical method of multi-DOF electrothermal MEMS micro-mirror

ZHANG Hao; XU Da-cheng; CHEN Qiao; XIE Hui-kai

doi:10.13873/J.1000-9787(2014)10-0017-04

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A model analytical method of multi-DOF electrothermal MEMS micro-mirror

更新时间：2025-09-11

- A model analytical method of multi-DOF electrothermal MEMS micro-mirror
- Vol. 33, Issue 10, Pages: 17-20+24(2014)
- 作者机构：
  
  1. 苏州大学电子信息学院
  2. 无锡微奥科技有限公司
  3. 美国佛罗里达大学电气与计算机工程系
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2014)10-0017-04
  CLC： TH-39;TH74
- Published：2014
- 稿件说明：
移动端阅览
[1]章皓,徐大诚,陈巧,谢会开.一种电热式MEMS微镜多自由度模型解析方法[J].传感器与微系统,2014,33(10):17-20+24.

ZHANG Hao, XU Da-cheng, CHEN Qiao, et al. A model analytical method of multi-DOF electrothermal MEMS micro-mirror[J]. 2014, 33(10): 17-20+24.
[1]章皓,徐大诚,陈巧,谢会开.一种电热式MEMS微镜多自由度模型解析方法[J].传感器与微系统,2014,33(10):17-20+24. DOI： 10.13873/J.1000-9787(2014)10-0017-04.

ZHANG Hao, XU Da-cheng, CHEN Qiao, et al. A model analytical method of multi-DOF electrothermal MEMS micro-mirror[J]. 2014, 33(10): 17-20+24. DOI： 10.13873/J.1000-9787(2014)10-0017-04.

摘要

结合微镜驱动器结构

通过引入热导和弹簧刚体模型分析了多驱动器间热传导和相互作用力导致的形变原因

并建立了多自由度微镜的数学模型。仿真与实验数据对比说明:建立的模型与实验结果具有较好的一致性

能够预测4个驱动器的输入响应特性。

Abstract

The deformation reason of actuator caused by heat conduction and interaction force is analyzed by introducing thermal conduction and spring rigid model combined with structure of micro-mirror actuator

and multiDOF mathematical model for micro-mirror is established.Comparison of simulation

and experimental data show that the constructed model agrees well with experimental results

it can predict input responses characteristics of four actuators.

关键词

Keywords

references

MEMS变形反射镜主要特性测试 [J]. 陈家凤,陈海清. 光子学报 . 2009(12)

Bimorph结构微热执行器的节点分析方法 [J]. 黎仁刚,黄庆安,李伟华. 仪器仪表学报 . 2007(04)

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