Research of temperature compensation of inclination sensor

YU Na; LIU Zhi-yuan; ZHAO Jia-long

doi:10.13873/J.1000-9787(2014)10-0014-03

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Research of temperature compensation of inclination sensor

更新时间：2025-09-11

- Research of temperature compensation of inclination sensor
- Vol. 33, Issue 10, Pages: 14-16(2014)
- 作者机构：
  
  中国电子科技集团公司第四十九研究所
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2014)10-0014-03
  CLC： TP212
- Published：2014
- 稿件说明：
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[1]于娜,刘志远,赵佳龙.倾角传感器的温度补偿研究[J].传感器与微系统,2014,33(10):14-16.

YU Na, LIU Zhi-yuan, ZHAO Jia-long. Research of temperature compensation of inclination sensor[J]. 2014, 33(10): 14-16.
[1]于娜,刘志远,赵佳龙.倾角传感器的温度补偿研究[J].传感器与微系统,2014,33(10):14-16. DOI： 10.13873/J.1000-9787(2014)10-0014-03.

YU Na, LIU Zhi-yuan, ZHAO Jia-long. Research of temperature compensation of inclination sensor[J]. 2014, 33(10): 14-16. DOI： 10.13873/J.1000-9787(2014)10-0014-03.

摘要

半导体元件参数随温度变化而产生的温度漂移

将导致倾角传感器本身存在测量偏差

影响倾角测量的准确度。介绍了一种温度补偿方法

对基于加速度原理的差分电容式倾角传感器进行了温度补偿。经过试验验证结果表明:这种方法能够实现倾角传感器的温度补偿

在-55

5℃温度范围内可将倾角传感器的温漂降低1个数量级

有效地减少了环境温度对倾角传感器性能的影响。

Abstract

Temperature drift of parameters of semiconductor elements along with variation of temperature

will cause inclination sensor exists measurement deviation which impact accuracy.Introduce a temperature compensation method which carry out temperature compensation on differential capacitive inclination sensor based on acceleration principle.The test results show that this method can realize temperature compensation of inclination sensor and the temperature drift decline one order of magnitude at the temperature range of-55 ℃

5 ℃

and effectively reduces impact of environment temperature on characteristics of inclination sensor.

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references

倾角传感器温度特性研究 [J]. 吴艳,郑学理,曾志强,张侃谕. 电子测量技术 . 2012(10)

具有温度自补偿功能的高分辨力倾角传感器的设计 [J]. 周庆飞,徐明龙. 传感器与微系统 . 2012(01)

基于微加速度传感器的倾角传感器 [J]. 王巍,李早平,王军,彭清祥. 仪表技术与传感器 . 2010(12)

基于SOC的高精度倾角测量系统的设计 [J]. 余小平,庹先国,王洪辉. 电子设计工程 . 2010(12)

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