Design and fabrication of a low-noise MEMS accelerometer

SONG Meng; CHANG Hong-long; DU Song-jie; XIE Jian-bing; LI Peng-cheng

doi:10.13873/J.1000-9787(2014)09-0088-03

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Design and fabrication of a low-noise MEMS accelerometer

更新时间：2025-09-11

- Design and fabrication of a low-noise MEMS accelerometer
- Vol. 33, Issue 9, Pages: 88-90+93(2014)
- 作者机构：
  
  西北工业大学空天微纳教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2014)09-0088-03
  CLC： TH824.4
- Published：2014
- 稿件说明：
移动端阅览
[1]宋萌,常洪龙,杜松杰,谢建兵,李鹏程.一种低噪声MEMS加速度计设计与制作[J].传感器与微系统,2014,33(09):88-90+93.

SONG Meng, CHANG Hong-long, DU Song-jie, et al. Design and fabrication of a low-noise MEMS accelerometer[J]. 2014, 33(9): 88-90+93.
[1]宋萌,常洪龙,杜松杰,谢建兵,李鹏程.一种低噪声MEMS加速度计设计与制作[J].传感器与微系统,2014,33(09):88-90+93. DOI： 10.13873/J.1000-9787(2014)09-0088-03.

SONG Meng, CHANG Hong-long, DU Song-jie, et al. Design and fabrication of a low-noise MEMS accelerometer[J]. 2014, 33(9): 88-90+93. DOI： 10.13873/J.1000-9787(2014)09-0088-03.

摘要

为了提高微加速度计的噪声性能

研究了一种基于绝缘体上硅（SOI）技术的单轴MEMS加速度计的设计和加工方案。该微加速度计采用大面积质量块的电容式检测结构

通过增加检测质量

在保证灵敏度的前提下

有效地降低了微加速度计的机械布朗噪声

增强了信噪比。另外

该微加速度计采用一种基于Al保护层的MEMS SOI工艺技术制造

有利于提高微加速度计的整体精度水平。测试结果表明:微加速度计的本底噪声为20μgn/√Hz

灵敏度为2.5 V/gn。

Abstract

In order to enhance noise characteristics of micro-accelerometer

design and fabrication scheme of a kind of single-axis MEMS accelerometer based on SOI technology is researched. Large-area-mass block capacitive detecting structure is used

through increasing detecting mass and under the premise that guarantee sensitivity

effectively reduce mechanical Brown noise of microaccelerometer and enhance SNR

then

the micro accelerometer is fabricated by Al support film SOI MEMS process which favors integral precise. Test result show that back ground noise of microaccelerometer is 20 μgn/√Hz

the sensitivity is 2. 5 V /gn.

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references

惯性技术研究现状及发展趋势 [J]. 王巍. 自动化学报 . 2013(06)

MEMS航天惯导产品及技术发展简介 [J]. 张英,戚红向,李德强,王世会,叶茂. 航天标准化 . 2010(03)

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