Design and simulation of a MEMS high-g<sub>n</sub> acceleration sensor

WU Qi; LIN Jing; YANG Jiang-tao

doi:10.13873/J.1000-9787(2014)09-0077-04

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Design and simulation of a MEMS high-g_n acceleration sensor

更新时间：2025-09-11

- Design and simulation of a MEMS high-g_n acceleration sensor
- Vol. 33, Issue 9, Pages: 77-80(2014)
- 作者机构：
  
  1. 中北大学计算机与控制工程学院
  2. 中北大学电子测试技术国防科技重点实验室
  3. 中北大学仪器科学与动态测试教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2014)09-0077-04
  CLC： TP212
- Published：2014
- 稿件说明：
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[1]邬琦,林靖,杨江涛.一种MEMS高g_n值加速度传感器的结构设计与仿真[J].传感器与微系统,2014,33(09):77-80.

WU Qi, LIN Jing, YANG Jiang-tao. Design and simulation of a MEMS high-g_n acceleration sensor[J]. 2014, 33(9): 77-80.
[1]邬琦,林靖,杨江涛.一种MEMS高g_n值加速度传感器的结构设计与仿真[J].传感器与微系统,2014,33(09):77-80. DOI： 10.13873/J.1000-9787(2014)09-0077-04.

WU Qi, LIN Jing, YANG Jiang-tao. Design and simulation of a MEMS high-g_n acceleration sensor[J]. 2014, 33(9): 77-80. DOI： 10.13873/J.1000-9787(2014)09-0077-04.

摘要

高gn值加速度传感器在侵彻武器等领域受到广泛应用

对量程、灵敏度、固有频率等指标也提出了更高的要求。设计了一种MEMS高gn值加速度传感器

在传统梁—岛结构加速度传感器的基础上进行了改进

采用主微梁互补结构在提高固有频率、量程的同时

提高了灵敏度。在梁的末端提出了新式的延伸梁结构设计

大大减小了集中应力的现象

提高了结构的抗过载能力。利用ANSYS有限元分析软件

对该加速度传感器进行了静态、模态和瞬态分析。经仿真验证

该MEMS高gn值加速度传感器的各项指标均满足要求

具有明显的优越性。

Abstract

High-gnaccelerometer is used widely in areas such as penetrator weapon

and higher requirements are also put forward in range

sensitivity

natural frequency and other indicators. Design a MEMS high-gnacceleration sensor

which is improved on the basis of traditional beam-island structure

adopting complementary structure with main-beams and micro-beams

which improves natural frequency and range

at the same time

improves sensitivity.A new design of extending beam structure is proposed at the end of beam

which reduces stress concentration phenomenon greatly and improves ability of anti-overload of the structure. The static

modal and transient properties are analyzed by the ANSYS finite element analysis software. Through simulation verification

the indicators of the MEMS high-gnacceleration sensor can meet requirements and have obvious advantages.

关键词

Keywords

references

MEMS高G值加速度传感器设计 [J]. 石云波,祁晓瑾,刘俊,孟美玉. 系统仿真学报 . 2008(16)

高量程加速度计的力学性能分析 [J]. 王钻开,宗登刚,陆德仁. 机械强度 . 2002(04)

高量程微机械压阻式加速度传感器研究 [D]. 黄全平. 中国科学院研究生院（上海微系统与信息技术研究所） 2002

Design of MEMS High g Accelerometer and Study on the Overload Ability [J] . Shi Yun Bo,Li Ping,Liu Jun. Advanced Materials Research . 2010 (139)

A silicon micromachined shock accelerometer with twin-mass-plate structure [J] . Zuankai Wang,Denggang Zong,Deren Lu,Bin Xiong,Xinxin Li,Yuelin Wang. Sensors & Actuators: A. Physical . 2003 (1)

Simulation, fabrication and testing of bulk micromachined 6H-SiC high- g piezoresistive accelerometers [J] . Andrew R. Atwell,Robert S. Okojie,Kevin T. Kornegay,Scott L. Roberson,Alain Beliveau. Sensors & Actuators: A. Physical . 2002 (1)

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Design and simulation of a MEMS high-gn acceleration sensor

DOI：10.13873/J.1000-9787(2014)09-0077-04

摘要

Abstract

关键词

Keywords

references

Design and simulation of a MEMS high-g_n acceleration sensor