Research on high speed UV sensing characteristics based on ZnO /Glass SAW device

GU Hang; HE Xing-li; LUO Ji-kui

doi:10.13873/J.1000-9787(2014)09-0035-03

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Research on high speed UV sensing characteristics based on ZnO /Glass SAW device

更新时间：2025-09-11

- Research on high speed UV sensing characteristics based on ZnO /Glass SAW device
- Vol. 33, Issue 9, Pages: 35-37+41(2014)
- 作者机构：
  
  浙江大学信息与电子工程学系
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2014)09-0035-03
  CLC： TN23
- Published：2014
- 稿件说明：
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[1]谷航,何兴理,骆季奎.基于ZnO/Glass声表面波器件的高速紫外传感特性研究[J].传感器与微系统,2014,33(09):35-37+41.

GU Hang, HE Xing-li, LUO Ji-kui. Research on high speed UV sensing characteristics based on ZnO /Glass SAW device[J]. 2014, 33(9): 35-37+41.
[1]谷航,何兴理,骆季奎.基于ZnO/Glass声表面波器件的高速紫外传感特性研究[J].传感器与微系统,2014,33(09):35-37+41. DOI： 10.13873/J.1000-9787(2014)09-0035-03.

GU Hang, HE Xing-li, LUO Ji-kui. Research on high speed UV sensing characteristics based on ZnO /Glass SAW device[J]. 2014, 33(9): 35-37+41. DOI： 10.13873/J.1000-9787(2014)09-0035-03.

摘要

基于氧化锌/玻璃（ZnO/Glass）结构的声表面波（SAW）器件可以用来制作性能优良的紫外探测器。使用有限元分析软件COMSOL Multiphysics仿真了该种结构的声表面波器件

并得到其S11参数。基于仿真结果

制备了相应的SAW器件

实验所用ZnO薄膜采用直流反应磁控溅射方法沉积

所制备的ZnO薄膜呈（0002）取向。基于该种结构的SAW紫外探测器对紫外光的反应时间仅3 s

其紫外探测的灵敏度高达36.4×10-6/mW/cm2。

Abstract

ZnO /Glass-based surface acoustic wave（ SAW） device can be used to fabricate UV light detector with excellent performance. Finite element analysis（ FEA） software COMSOL Multiphysics is used to simulate SAW device with this structure

and the S11 parameter is achieved. Based on simulation result

corresponding SAW devices is fabricated. ZnO thin film with（ 0002） orientation is depositted by direct-current（ DC） reactive magnetron sputtering. Response time of SAW UV detector based on this structure to UV light is only 3 s

and sensitivity of UV detection is as high as 36. 4 × 10- 6/mW /cm2.

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references

退火对ZnO薄膜特性的影响与紫外探测器的研制 [J]. 吴跃波,杨启耀,雷声,吴孙桃. 传感技术学报 . 2012(05)

基于ZnO半导体纳米线膜的声表面波型紫外探测器 [J]. 贺永宁,文常保,李昕,王兆宏,朱长纯. 功能材料与器件学报 . 2008(01)

Love mode surface acoustic wave ultraviolet sensor using ZnO films deposited on 36° Y-cut LiTaO 3 [J] . Hua-Feng Pang,Yong-Qing Fu,Zhi-Jie Li,Yifan Li,Jin-Yi Ma,Frank Placido,Anthony J. Walton,Xiao-Tao Zu. Sensors & Actuators: A. Physical . 2013

Characteristics of SAW UV sensors based on a ZnO/Si structure using third harmonic mode [J] . Duy-Thach Phan,Gwiy-Sang Chung. Current Applied Physics . 2011 (1)

Highly sensitive ultraviolet detector using a ZnO/Si layered SAW oscillator [J] . Ching-Liang Wei,Ying-Chung Chen,Chien-Chuan Cheng,Kuo-Sheng Kao,Da-Long Cheng,Po-Shu Cheng. Thin Solid Films . 2009 (11)

ZnO based surface acoustic wave ultraviolet photo sensor [J] . Sanjeev Kumar,Gil-Ho Kim,K. Sreenivas,R. P. Tandon. Journal of Electroceramics . 2009 (1)

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