Simulation analysis of MEMS high-<i>g</i> piezoresistive accelerometer

ZHANG Heshuai; ZHANG Zhe

Chinese

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Simulation analysis of MEMS high-g piezoresistive accelerometer

Design & Manufacture | 更新时间：2026-06-24

- Simulation analysis of MEMS high-g piezoresistive accelerometer
- Vol. 45, Issue 6, Pages: 102-107(2026)
- 作者机构：
  
  石家庄财经职业学院交通工程学院,河北,石家庄,050000
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP212
- Published：2026
- 稿件说明：
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ZHANG Heshuai, ZHANG Zhe. Simulation analysis of MEMS high-g piezoresistive accelerometer[J]. 2026, 45(6): 102-107.
DOI：

ZHANG Heshuai, ZHANG Zhe. Simulation analysis of MEMS high-g piezoresistive accelerometer[J]. 2026, 45(6): 102-107. DOI：

摘要

研究的MEMS高

值加速度计，是一种可用于检测强烈振动与大冲击信号的核心电子元器件。首先，研究了压阻式加速度计的压阻原理，设计了本文加速度计敏感结构；然后，根据敏感结构的应力变化规律，确定压敏电阻的排布，同时，制定了其后续的硬件电气连接关系；其次，进一步分析设计的加速度计结构的加工流程，并对其进行了必要的封装；最后，仿真结果表明：该加速度计量程可达到10000

，灵敏度为39.62μV/

，一阶固有频率为28049Hz。

Abstract

The MEMS high

accelerometer investigated is a crucial electronic component capable of detecting intense vibration and significant impact signals.Firstly

the piezoresistive principle of the piezoresistive accelerometer is studied

and the sensitive structure of the proposed accelerometer is designed.Subsequently

according to the stress variation rule of the sensitive structure

the layout of the piezoresistors is determined

and the subsequent hardware electrical connection relationship is established.Furthermore

the processing flow of the designed accelerometer structure is thoroughly analyzed

and essential packaging is carried out.The simulation results indicate that the measurement range of th

e accelerometer reaches 10000

with a sensitivity of 39.62μV/

and a firstorder natural frequency of 28049Hz.

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Related Institution

School of Electrical and Information Engineering,Guangxi University of Science and Technology

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中国工程物理研究院电子工程研究所

Science and Technology on Electronic Test ＆ Measurement Laboratory,North University of China

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Simulation analysis of MEMS high-g piezoresistive accelerometer

DOI：

摘要

Abstract

关键词

Keywords

references