Aiming at the problems of limited range and insufficient overload capacity in six-axis measurement of MEMS multi-axis force sensors

an optimized design method based on a serpentine beam structure is proposed.Key characteristic parameters such as the ratio of the serpentine beam’s line diameter to the arc outer diameter

unit angle

and diameter-width ratio are extracted to establish a parametric finite element model.A multi-objective genetic algorithm is employed for the collaborative optimization of stiffness and stress.The optimized sensor structure achieves a force measurement range of 4~10N when a displacement of 1μm is generated

under the condition that the maximum stress does not exceed 500MPa

which is significantly superior to common design indicators.Simulation results demonstrate that the proposed method effectively achieves the coordinated control of stiffness improvement and stress concentration in multiple configurations

providing a reliable approach for the design of high-performance MEMS multi-axis force sensors.