Investigation of fluorinated polyimide and UiO—66 composite humidity-sensitive materials

JIANG Xiaolong; MU Yongfeng; LIU Zhihui; ZHENG Li; LIU Weiwei; YU Yang; YANG Ming; DOU Yanwei

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Investigation of fluorinated polyimide and UiO—66 composite humidity-sensitive materials

Design & Manufacture | 更新时间：2026-03-18

- Investigation of fluorinated polyimide and UiO—66 composite humidity-sensitive materials
- Vol. 45, Issue 3, Pages: 128-133(2026)
- 作者机构：
  
  1. 黑龙江省微纳敏感器件与系统重点实验室,黑龙江大学,黑龙江,哈尔滨,150080
  2. 中国电子科技集团公司第四十九研究所,黑龙江,哈尔滨,150028
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP212
- Published：2026
- 稿件说明：
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JIANG Xiaolong, MU Yongfeng, LIU Zhihui, et al. Investigation of fluorinated polyimide and UiO—66 composite humidity-sensitive materials[J]. 2026, 45(3): 128-133.
DOI：

JIANG Xiaolong, MU Yongfeng, LIU Zhihui, et al. Investigation of fluorinated polyimide and UiO—66 composite humidity-sensitive materials[J]. 2026, 45(3): 128-133. DOI：

摘要

对高性能湿度传感器日益增长的需求

正推动着湿度敏感材料领域的快速发展。通过将氟化聚酰亚胺（FPI）聚合物与改性的UiO—66（一种金属有机框架（MOF）材料）结合

开发出一种新型复合湿敏材料

并通过MEMS技术

制备了以改性UiO—66与FPI复合材料为介质的电容式湿度传感器。结果表明

FPI—2传感器在相对湿度10%~90%RH范围内表现出高灵敏度（0.85pF/%RH）、低迟滞性（0.78%RH）和良好线性度（

=0.9808）

并在60天测试周期内保持良好的稳定性。

Abstract

The escalating need for high-performance humidity sensors drives the rapid development of humidity-sensitive materials.A new type of composite humidity-sensitive material is developed by combining fluorinated polyimide (FPI) polymer with modified UiO—66 (a type of metal-organic framework（MOF）material)

and capacitive humidity sensors with modified UiO—66 and FPI composite materials as the dielectric are prepared via MEMS technology.Results show that the FPI—2 sensor exhibits high sensitivity (0.85pF/%RH)

low hysteresis (0.78%RH)

and good linearity (

=0.9808) within the relative humidity range of 10%~90%RH

and maintains good stability with a 60—day test period.

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