Zinc oxide(ZnO)is used as substrate

and platinum（Pt）/ZnO composite material with oxygen vacancy-rich and highly dispersed Pt nanoparticles is prepared using the impregnation-photodeposition method.Based on this

MEMS ethanol gas sensor is fabricated.The results indicate that the loading of Pt significantly improves the sensitivity of the ZnO/MEMS sensor.At 220℃

the response time of 1.0% Pt/ZnO toward ethanol gas with a volume fraction of 20×10

-6

is only 1.6s and the response value can reach 21.4

which is 15 times that of the ZnO sensor unloaded Pt nanoparticles.At the same time

the loading of Pt reduces the optimal oper

ating temperature of the sensor by 60℃

thereby decreasing the power consumption of the sensor.Furthermore

the 1.0% Pt/ZnO sensor has excellent selectivity and stability for ethanol

exhibiting a good linear response relationship to ethanol gas with different volume fractions.