Design and manufacture of novel microlever-enhanced MEMS accelerometer

GENG Zhipeng; MIAO Bin; FENG Changkun; TAO Jinyan; LI Shuxian; LI Jiadong

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Design and manufacture of novel microlever-enhanced MEMS accelerometer

Design & Manufacture | 更新时间：2026-01-22

- Design and manufacture of novel microlever-enhanced MEMS accelerometer
- Vol. 45, Issue 1, Pages: 106-110(2026)
- 作者机构：
  
  1. 大连大学机械工程学院,辽宁,大连,116622
  2. 中国科学院苏州纳米技术与纳米仿生研究所轻量化实验室,江苏,苏州,215123
  3. 中国科学院多功能材料与轻巧系统重点实验室,江苏,苏州,215123
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP212;TN305
- Published：2026
- 稿件说明：
移动端阅览
GENG Zhipeng, MIAO Bin, FENG Changkun, et al. Design and manufacture of novel microlever-enhanced MEMS accelerometer[J]. 2026, 45(1): 106-110.
DOI：

GENG Zhipeng, MIAO Bin, FENG Changkun, et al. Design and manufacture of novel microlever-enhanced MEMS accelerometer[J]. 2026, 45(1): 106-110. DOI：

摘要

为提升MEMS加速度计的灵敏度，提出并设计了一种新型微杠杆增强MEMS加速度计。利用有限元分析工具对有、无微杠杆结构的双摆式加速度计进行了仿真计算。结果显示增加杠杆结构后扭转梁的等效应力集中只有无杠杆结构时等效应力水平的47%，并且检验质量块位移为无杠杆结构时的3.5倍。进一步对杠杆结构辅助双摆式加速度计进行了工艺路线设计和制作，并将敏感结构与信号检测电路进行了集成。测试结果表明:新型加速度计的灵敏度达到179.13mV/

，通过零偏稳定性计算

Allan方差为2.15m

/h。研究结果可以为MEMS加速度计提升灵敏度的研究提供参考。

Abstract

In order to improve the sensitivity of MEMS accelerometer

a novel microlever enhanced MEMS accelerometer is proposed and designed.Double-pendulum accelerometers with and without microlever structures are simulated and calculated

by using the finite element analysis tool.The results show that the equivalent stress concentration of the torsion beam after increasing the lever structure is only 47% of the equivalent stress level of the non-lever structure

and the displacement of the proof mass is 3.5 times of the non-lever structure.Further

routing of the double pendulum accelerometer based on lever is designed and fabricated

and the sensitive structure is integrated with

the signal detection circuit.Test results show that sensitivity of the novel accelerometer is up to 179.13mV/

and the Allan deviation by is 2.15m

/h zero-bias stability calculation.The research results can provide reference for the research of improving the sensitivity of MEMS accelerometers.

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