Preparation and study of high-temperature characteristic of platinum resistor thin-film temperature sensor

ZHEN Chengwei; LI Shuang; SHI Nanyue; DONG Helei

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Preparation and study of high-temperature characteristic of platinum resistor thin-film temperature sensor

Research & Approach | 更新时间：2025-12-30

- Preparation and study of high-temperature characteristic of platinum resistor thin-film temperature sensor
- Vol. 44, Issue 12, Pages: 48-50+56(2025)
- 作者机构：
  
  1. 中北大学微纳器件与系统教育部重点实验室,山西,太原,030051
  2. 2.中北大学仪器科学与动态测试教育部重点实验室,山西,太原,030051
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP212
- Published：2025
- 稿件说明：
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ZHEN Chengwei, LI Shuang, SHI Nanyue, et al. Preparation and study of high-temperature characteristic of platinum resistor thin-film temperature sensor [J]. 2025, 44(12): 48-50+56.
DOI：

ZHEN Chengwei, LI Shuang, SHI Nanyue, et al. Preparation and study of high-temperature characteristic of platinum resistor thin-film temperature sensor [J]. 2025, 44(12): 48-50+56. DOI：

摘要

随着航空航天、原子能技术、冶金与石油化工等行业的快速发展，对于在800℃高温环境下长期稳定测量的需求变得迫切。提出了一种体积小、耐高温的铂(Pt)电阻薄膜传感器，采用了磁控溅射法在Al

陶瓷基底上沉积了黏附层铬(Cr)和敏感层铂，并通过对铂膜进行退火处理和增加表面防护层（Al

和AlN）的方式，提升了其耐高温性能。同时

对传感器的高温性能进行测试。结果表明：铂电阻薄膜温度传感器的电阻温度系数（TCR）为5630×10

-6

℃，传感器的响应时间为26.4s，在800℃的环境下

传感器持续稳定测量，可以广泛应用于航天航空、汽车工业等高温领域。

Abstract

With the rapid development of aerospace

atomic energy technology

metallurgy and petrochemical industries

there is an urgent need for long-term stable measurements at 800℃ high temperature environment.A small size

high temperature resistant platinum resistor thin film sensor is proposed using magnetron sputtering method

adhesion layer chromium(Cr)and sensitive layer platinum are deposited on the Al

ceramic substrate

and through annealing treatment on platinum film and adding a surface protective layer (Al

and AlN)

to enhance its high temperature resis

tance characteristic.Meanwhile

the high temperature performance of the sensor is tested.The results show that the temperature coefficient of resistance(TCR)of the platinum resistor thin-film temperature sensor is 5630×10

-6

℃

the response time of the sensor is 26.4s

the sensor can measure steadily and continuously in 800℃ environment.The sensor can be widely used in aerospace

automotive industry and other high-temperature fields.

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