Design of capacitive 3D flexible tactile sensing array system

GUO Yusen; YIN Minghui; GOU Guangyang; LIU Chunxiu; XUE Ning

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Design of capacitive 3D flexible tactile sensing array system

Design & Manufacture | 更新时间：2025-12-30

- Design of capacitive 3D flexible tactile sensing array system
- Vol. 44, Issue 10, Pages: 52-55+60(2025)
- 作者机构：
  
  1. 中国科学院空天信息研究院传感器技术国家重点实验室,北京,100190
  2. 中国科学院大学电子电气与通信工程学院,北京,100049
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP212
- Published：2025
- 稿件说明：
移动端阅览
GUO Yusen, YIN Minghui, GOU Guangyang, et al. Design of capacitive 3D flexible tactile sensing array system[J]. 2025, 44(10): 52-55+60.
DOI：

GUO Yusen, YIN Minghui, GOU Guangyang, et al. Design of capacitive 3D flexible tactile sensing array system[J]. 2025, 44(10): 52-55+60. DOI：

摘要

为实现人机交互等领域对指尖触觉的检测，基于电容原理设计了一种柔性触觉传感阵列用于三维(3D)力测量。以聚二甲基硅氧烷(PDMS)作为传感阵列中间支撑材料，以聚酰亚胺(PI)为柔性基底沉积金属电极图案，并在电极表面沉积金属金提升导电能力。该三维柔性触觉传感阵列制备工艺简单，测试结果表明：其能够检测0~30N的法向力与0~10N的切向力。测得传感单元最大偏差为2.8%，最大漂移为5.6%。设计的采集系统可同时采集6个传感阵列，240通道数据，响应时间为11ms。该传感阵列具有灵活性与通用性并具有较大量程，使其可以应用于机器人触觉感知。

Abstract

To realize the detection of fingertip touch in human-computer interaction and other fields

a flexible tactile sensing array is designed for three-dimensional(3D)force measurement based on the capacitive principle.Polydimethylsiloxane(PDMS)is used as the intermediate support material of the sensing array

polyimide(PI)is used as the flexible substrate to deposit metal electrode patterns

and metallic gold is deposited on the electrode surface to enhance the conductivity.The three-dimensional flexible tactile sensing array has a simple preparation process

and the test results show that it can detect a normal force of 0~30N and a tangential force of 0~10N.The maximum deviation of the sensing unit is measured to be 2.8%

and the maximum drift is 5.6%.The designed acquisition system can simultaneously acquire 6 sensing arrays with 240 channels of data and a response time of 11ms.The sensing array is flexible and versatile

with a large range

enabling it to be applied to robotic tactile sensing.

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