Effects of annealing on gas sensing performance and microstructure of Ti-WO<sub>3</sub> films

ZHANG Zhao-tao; YANG Xiao-hong; MA Yong; SUN Cai-qin; YAN Yong-yan; ZHU Shao-ping

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Effects of annealing on gas sensing performance and microstructure of Ti-WO₃ films

更新时间：2025-09-11

- Effects of annealing on gas sensing performance and microstructure of Ti-WO₃ films
- Issue 8, Pages: 39-41(2008)
- 作者机构：
  
  重庆师范大学物理与信息技术学院
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP212.1
- Published：2008
- 稿件说明：
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[1]张召涛,杨晓红,马勇,孙彩芹,闫勇彦,朱绍平.退火处理对Ti-WO_3薄膜的结构和气敏特性的影响[J].传感器与微系统,2008(08):39-41.

ZHANG Zhao-tao, YANG Xiao-hong, MA Yong, et al. Effects of annealing on gas sensing performance and microstructure of Ti-WO₃ films[J]. 2008, (8): 39-41.
[1]张召涛,杨晓红,马勇,孙彩芹,闫勇彦,朱绍平.退火处理对Ti-WO_3薄膜的结构和气敏特性的影响[J].传感器与微系统,2008(08):39-41. DOI：

ZHANG Zhao-tao, YANG Xiao-hong, MA Yong, et al. Effects of annealing on gas sensing performance and microstructure of Ti-WO₃ films[J]. 2008, (8): 39-41. DOI：

摘要

用X射线衍射和透射电镜表征了直流磁控溅射法制得的Ti-WO3薄膜的晶型、晶格常数、粒径等。研究了退火对Ti-WO3薄膜气敏性质和微结构的影响

找出了最佳退火温度和工作温度;并对机理进行了分析。结果表明:450℃退火的薄膜的气敏效应很好

最佳工作温度在150℃左右;

Abstract

The crystal-type

lattice parameters

grain sizes and morphology of the Ti-WO3 films made by DC magnetron sputtering are characterized by XRD.The effects of annealing on the gas sensing performance and microstructure of the Ti-WO3 films are studied.The optimal annealing temperature and operating temperature are found out

and the mechanism of these sensors is discussed.The results show that annealing at a low temperature 450℃ can improve the gas sensing performance.The best operating temperature is about 150℃.

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references

气相法WO 3 纳米粉体的H 2 S气敏性能研究 [J]. 林金阳,黄世震,林伟,陈伟,黄建敏. 传感技术学报 . 2006(03)

固体涂层吸收采样流动注射光度法测定大气中的二氧化氮 [J]. 王胜天,丁兰,秦玉华,闫吉昌. 分析化学 . 2005(12)

WO 3 薄膜材料的气敏性能 [J]. 姜淼,侯峰,徐廷献,徐明霞. 硅酸盐学报 . 2004(09)

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Effects of annealing on gas sensing performance and microstructure of Ti-WO3 films

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摘要

Abstract

关键词

Keywords

references

Effects of annealing on gas sensing performance and microstructure of Ti-WO₃ films