Review of key technology of electrochemical fabrication

WANG Xiao-xia

Chinese

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Review of key technology of electrochemical fabrication

更新时间：2025-09-11

- Review of key technology of electrochemical fabrication
- Issue 8, Pages: 5-7+15(2008)
- 作者机构：
  
  成都航空职业技术学院
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN405
- Published：2008
- 稿件说明：
移动端阅览
[1]王晓霞.EFAB工艺关键技术评述[J].传感器与微系统,2008(08):5-7+15.

WANG Xiao-xia. Review of key technology of electrochemical fabrication[J]. 2008, (8): 5-7+15.
[1]王晓霞.EFAB工艺关键技术评述[J].传感器与微系统,2008(08):5-7+15. DOI：

WANG Xiao-xia. Review of key technology of electrochemical fabrication[J]. 2008, (8): 5-7+15. DOI：

摘要

EFAB技术可实现真三维金属微结构器件的快速、自动化、批量制造

是微加工领域一项重大的突破。介绍了EFAB技术原理

并对其加工设备、分层技术、实时掩模、过程监控等关键技术进行了剖析

通过与其他微加工技术对比

揭示其在微加工技术群中的优越性

给出了应用实例。

Abstract

Electrochemical fabrication （EFAB）may implement prototyping and volume production of functional metal microscale components

devices and systems for MEMS

and is a breakthrough in microfabrication technology.The principle and characters of EFAB are described

and machining tool

slice technology

instant mask

process monitoring are studied.Some important applications of EFAB in MEMS area are also presented.

关键词

Keywords

references

微机电系统的研究与展望 [J]. 林忠华,胡国清,刘文艳,张慧杰. 微电子学 . 2005(01)

微传感器与微执行器全书[M]. 科学出版社 , (美)格雷戈里T.A.科瓦奇（GregoryT.A.Kovacs）著, 2003

A study on the machining of high-aspect ratio micro-structures using micro-EDM [J] . H.S. Lim,Y.S. Wong,M. Rahman,M.K. Edwin Lee. Journal of Materials Processing Tech. . 2003 (1)

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Related Institution

Key Laboratory of Biorheological Science and Technology of Ministry of Education, School of Bioengineering,Chongqing University

Department of Military Information Engineering,Chongqing Communication College

State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University

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