Take the interdigited electrodes as an example

the preparation of microelectrodes based on quartz and glass slides are investigated

based on requirement for parameters of photolithography

study is focused on influence of exposure and development time on microelectrodes.Two different electrodes are fabricated on two kinds of substrates separately

and analysis is carried out using contrast

precision and other key parameters

and slide is selected as the chip substrate

and also the optimal process parameters are obtained ultimately

fabricate PDMSglass microfluidic chip with integrated electrodes

positive and negative DEP phenomenon of yeast cells is observed through experiments successfully.