JIANG Sheng-wei, SHI Shuai, YUAN Jiao-jiao, et al. Fabrication and modeling of a suspended graphene pressure sensor[J]. 2014, 33(5): 111-114+120. DOI: 10.13873/j.1000-97872014.05.042.
A suspended graphene pressure sensor which is appropriate for nano-electro-mechanical system( NEMS) is proposed
and combined with traditional micro mechanism process technology
its fabrication process is also put forward. Raman spectra is used to represent mechanically exfoliated graphene membrane with different thickness
and the fact that the intensity of G and 2D peaks are related to membrane thickness is identified. Based on the membrane bulge test
respectively gave the relationship between maximum deflection of graphene membrane suspending on rectangle
square and circle cavity and pressure difference; meanwhile
pressure sensitivity of membrane under the three cavity shapes are calculated respectively
and it can be found that graphene membrane of single-layer graphene membrane under rectangle cavity is the most and when rectangle width
square length or circle diameter is bigger
or membrane thickness is smaller
pressure sensitivity is higher
and the calculation result shows that the pressure sensor has high sensitivity.
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references
Developing ultrasensitive pressure sensor based on graphene nanoribbon: Molecular dynamics simulation [J] . Oh Kuen Kwon,Jun Ha Lee,Ki-Sub Kim,Jeong Won Kang. Physica E: Low-dimensional Systems and Nanostructures . 2013
Ultrahigh electron mobility in suspended graphene [J] . K.I. Bolotin,K.J. Sikes,Z. Jiang,M. Klima,G. Fudenberg,J. Hone,P. Kim,H.L. Stormer. Solid State Communications . 2008 (9)