In order to fulfill in-situ measurement of temperature in harsh environments

such as high temperature

mechanical rotating and hermetical space

etc

a kind of high Curie point ferroelectric ceramic is used as temperature sensitive material

based on conventional low temperature co-fired ceramic（ LTCC） technology

sacrificial layer filling technology is used to guarantee processing compatibility of fabrication process

and a novel passive capacitive temperature sensor based on LTCC substrate is fabricated successfully. By using mutual coupling between the external reader antenna and sensor coil

temperature characteristic test is realized from room temperature to 700 ℃

and test result shows that this kind of capacitive temperature sensor has good temperature sensitive characteristics

and average sensitivity is- 7. 33 kHz / ℃.