Heater has played important roles in the field of atomic clock

gas sensor

biosensor and so on. The power consumption reduction of these devices has great practical significances. A adiabatic suspended structure is designed and fabricated

and heater and temperature sensor are designed on the polyimide membrane to heat the chip and measure the temperature. Experimental results show that the power consumption caused by thermal conductivity of the polyimide adiabatic suspension structure is only 0. 95 % compared to the case without adiabatic suspension structure

therefore it can greatly reduce the power consumption caused by thermal conductivity

even in the case without vacuum encapsulation

the power consumption can also be reduced to 36. 7 % when the temperature of chip maintains at 100 ℃; meanwhile the structure also has very good mechanical properties

when carrying a silicon chip with volume of 14 mm × 7 mm × 1 mm

the safety factor can be up to 56. 58

therefore it has a great promising application prospect.