Aiming at problem that in integrated optics micro cavity cantilever beam type accelerometer based on photoelastic effect is difficult to achieve high sensitivity and high impact resistance at the same time

a scheme to increase perimeter of optical micro cavity is proposed. It is derived through detailed theoretical analysis

that by increasing perimeter of micro cavity

can effectively increase micro cavity resonance point wavelength offset under inertia force

improve detection sensitivity. Multi-loop length straight racetrack type micro cavity structure is designed

which integrates silicon micro-resonator with 5 297 μm perimeter in 100 μm × 600 μm cantilever beam area. The silicon micro-resonator structure is fabricated by micro-electro-mechanical-system（ MEMS） technology

and its quality factor is 105by test. The structure can be used in acceleration sensor

which can effectively improve detection sensitivity without reducing impact resistance of sensor and range.