应用静电纺丝法制备PZT纳米纤维薄膜

王建艳; 裴强; 吴玉玲; 郭航

doi:10.13873/j.1000-97872014.04.001

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应用静电纺丝法制备PZT纳米纤维薄膜

研究与探讨 | 更新时间：2025-09-11

- 应用静电纺丝法制备PZT纳米纤维薄膜
- Fabrication of PZT nanofibers film by electrospinning
- 传感器与微系统 2014年33卷第4期页码：56-58
- 作者机构：
  
  1. 厦门大学物理与机电工程学院
  2. 厦门大学萨本栋微米纳米科学技术研究院
- 作者简介：
- 基金信息：
  
  国家“863”计划资助项目（2007AA04Z330）
- DOI：10.13873/j.1000-97872014.04.001
  中图分类号： TQ340.6
- 纸质出版：2014
- 稿件说明：
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[1]王建艳,裴强,吴玉玲,郭航.应用静电纺丝法制备PZT纳米纤维薄膜[J].传感器与微系统,2014,33(04):56-58.

WANG Jian-yan, PEI Qiang, WU Yu-ling, et al. Fabrication of PZT nanofibers film by electrospinning[J]. 2014, 33(4): 56-58.
[1]王建艳,裴强,吴玉玲,郭航.应用静电纺丝法制备PZT纳米纤维薄膜[J].传感器与微系统,2014,33(04):56-58. DOI： 10.13873/j.1000-97872014.04.001.

WANG Jian-yan, PEI Qiang, WU Yu-ling, et al. Fabrication of PZT nanofibers film by electrospinning[J]. 2014, 33(4): 56-58. DOI： 10.13873/j.1000-97872014.04.001.

摘要

提出应用静电纺丝法制备PZT纳米纤维薄膜。研究中配制PZT溶液后再进行静电纺丝

获得了PZT纳米纤维薄膜

并且通过调整纺丝时间和沉积次数来控制纳米纤维薄膜的厚度。运用SEM对获得的热处理前后的薄膜进行了观察对比

测量其平均直径约为200 nm;运用XRD对退火后的样品进行分析

测得样品的主要成分为Pb（Zr0.52Ti0.48）O3

证明所制备的正是PZT薄膜;运用AFM测得薄膜的表面粗糙度为1.034 nm

说明该纳米薄膜材料非常的均匀整齐。

Abstract

Using electrospinning to fabricate PZT nanofibers film is presented. After PZT solution is prepared

electrospinning is carried out

and PZT nanafibers film is achieved

and control the thickness of nanofibers film by adjusting the spinning time and depositting times. The fabricated samples are characterized and analyzed by using SEM

XRD and AFM

the SEM results show that the diameter of the fabricated PZT nanofibers is about 200 nm before annealing; XRD results show that main component of the film after annealing is Pb（ Zr0. 52Ti0. 48） O3

which proves that the fabricated film is just PZT thin film; the surface roughness of the film tested by AFM is 1. 034 nm

which illustrates that the nanofibers film is very tidy and uniform.

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references

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半导体集成电路制造手册[M]. 电子工业出版社 , (美) 耿怀玉, 2006

Structural, ferroelectric and optical properties of PZT thin films [J] . S.K. Pandey,A.R. James,R. Raman,S.N. Chatterjee,Anshu Goyal,Chandra Prakash,T.C. Goel. Physica B: Physics of Condensed Matter . 2005 (1)

Electrospinning of Nanofibers: Reinventing the Wheel? [J] . D. Li,Y. Xia. Advanced Materials . 2004 (14)

Electrospun fibrous polyacrylic acid membrane-based gas sensors [J] . Bin Ding,Michiyo Yamazaki,Seimei Shiratori. Sensors & Actuators: B. Chemical . 2004 (1)

Effect of pyrolysis temperature on preferential orientation and electrical properties of sol-gel derived lead zirconate titanate films [J] . Wen Gong,Jing-Feng Li,Xiangcheng Chu,Longtu Li. Journal of the European Ceramic Society . 2003 (10)

Orientation effects in chemical solution derived Pb（Zr 0.3 ,Ti 0.7 ）O 3 thin films on ferroelectric properties [J] . Seung-Hyun Kim,D.-Y. Park,H.-J. Woo,D.-S. Lee,J. Ha,Cheol Seong Hwang,I.-B. Shim,A.I. Kingon. Thin Solid Films . 2002 (1)

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