A L-shaped two-dimensional（ 2D） micro-force sensor with cantilever beam structure is designed.On the basis of elastic mechanics and mechanics of materials

to build model with 3D software Solidworks and stress analysis with simulation software ANSYS.Calibrate sensor entity

to obtain relationship between force and output voltage.On the basis of design and analysis on 2D micro-force sensor

a 2D array test system of micro-force sensors is developed.Finally

wet adhesion test experiments under different preload are implemented on test system to verify reliability of sensor and system.