Aiming at need of health monitoring on dynamic vibration characteristics of high grade digitally controlled machine tools

a single inertial mass piezoelectric four-dimensional acceleration sensor is put forward.Structure and working principle of four-dimensional acceleration sensor are introduced

and its mathematic model is derived

and use ANSYS finite element software to carry out simulation study on static sensitivity

dimension coupling and dynamic natural frequency

dimension coupling.Research results show that the sensor can realize sensing of four-dimensional acceleration

it has good linearity

high rigidity

and theoretical natural frequency is more than 25 kHz

no static cross dimension coupling and low dimension coupling

which can satisfy design target of sensor.