Si micromachined electrostatically suspended accelerometers which combines electrostatic suspension and micromachined fabrication technology

can realize extremely high resolution with ultra-low acceleration range for miro-grivity space applications.A low range

tri-axis micromachined electrostatically suspended accelerometer is designed with a free parallelepiped proof mass

and realized in a glass-silicon-glass sandwich structure by bulk silicon micromachining technology

and property of the force balance loop of accelerometer is analyzed.A DSP- based digital controller is realized to achieve stable levitation of the proof mass electrostatically in six degrees of freedom.The experimental results of the accelerometer operated in the atmospheric environment show that the closed-loop suspension bandwidth and measuring ranges are 88.1 Hz

0.220 g n in the x axis; 118.2 Hz

0.313 g n in the y axis; and 10.7 Hz

3.53 g n in the z axis

respectively.