A double cantilever supported ohmic contact-type RF MEMS switch is designed by using surface micromachined process

the material is gold.As a result of the theoretical analysis on actuation voltage

the lower the stiffness of cantilever is

the smaller the pull-down voltage is.The most effective way to reduce stiffness is to decrease thickness of cantilever

because stiffness is proportional to cube of the cantilever thickness.Through property simulation

it’s observed that the sealing voltage of the switch is 44 V

the contact force is 22.45 μN

the resonant frequency of which is 25.5 kHz.When the switch is closed

the contact may bounce a few times before making permanent contact

this bouncing increases the effective closing time of the switch.The switch bounce last for 174.94 μs at 50 V and 66.84 μs at 60 V respectively

which shows that through appropriately an increase voltage can effectively reduce switching time and time from shutting to level off.