YANG Sui-jun, WU Yun-chen-ming, YU Fang-zhou, et al. Research and fabrication of thin film thermocouple based on electronic printing technology[J]. 2014, 33(1): 85-88.
YANG Sui-jun, WU Yun-chen-ming, YU Fang-zhou, et al. Research and fabrication of thin film thermocouple based on electronic printing technology[J]. 2014, 33(1): 85-88. DOI: 10.13873/j.1000-97872014.01.037.
Thin-film thermocouple has many excellent characteristics
such as small size
small heat capacity and fast response speed
in recent years
it becomes the focus of research scholars. Common preparation methods for thin-film thermocouple are RF sputtering
ion plating method and DC pulsed magnetron sputtering method
etc.However
these methods are complex to operate
and production time is long and efficiency is low
success rate is low and reproducibility is poor. Electronic printing technology is used to prepare Au-Pt thin film thermocouple.Solubilized gold and platinum materials is printed onto substrate
and then print it to be Au-Pt thin film thermocouple. This method is convenient
and fast for operation and less pollution. Experiments show that
the AuPt thin film thermocouple fabricated by electronic printing technology meets requirements of vertification regulation