Effect of parametric amplification is a nonlinear vibration amplification effect. This effect can greatly increase the amplitude of resonant sensor such as MEMS gyroscope and accelerometer

thereby improve the detection sensitivity and signal-to-noise ratio of the resonant sensor. A MEMS resonator with parametric amplification effect is designed according to theoretical analysis and finite element simulation. The resonator is fabricated with the SOG processing technology and experimental research is carried out under the pressure of950 Pa

and the relationship between parametric excitation voltage and phase and magnification times is derived.Experimental results show that the measured results of effect of parametric amplification coincide well with theoretical analysis

and when the parametric excitation voltage is 5. 7 V

the parametric amplification multiple is over 50 times

structure amplitude is significantly improved

which provides a new method to improve performance of MEMS inertial appearance.