Resonance tunnelling effect is introduced and the resonant tunnelling piezoresistive micro acceleration sensor experimental detection scheme is designed based on the resonant tunnelling diode(RTD).The output linearity
frequency response and sensitivity of accelerometer under different bias is comprehensively tested.The high and low temperature experiments and the comparative analysis of impulse response experiments are also conducted.Research results provide comprehensive and accurate datas
and provide reliable basis for resonant tunnelling piezoresistive RTD sensor.