Capacitive micro accelerometer electrical parameter calibration and calibration product manufacturing process

through calibration process of scale factor can ensure the linearity of sensor output.Using MS3110 tiny capacitance reading circuit

according to the requirements of the output function

as long as Cs1

Cs2

Cf three capacitance value is determined through three points（1

0

-1 gn）can determine scale factor（SF）and bias voltage

so that automatic calibration of scale factor of capacitive micro accelerometer is realized.Experimental results show that through multiple automatic calibration

relative error of sensor scale factor is 0.79 %.