LI Chen, XIONG Ji-jun, TAN Qiu-lin, et al. Preparation of capacitive passive pressure sensor based on LTCC technology[J]. 2013, 32(6): 95-97. DOI: 10.13873/j.1000-97872013.06.037.
Ceramic has been widely applied for its stable electrical properties
mechanical robustness and chemically inert.In order to realize the stress test in high temperature
high pressure
humidity and other harsh environment
with a kind of ceramics and high temperature resistant conductive paste for matrix
use LTCC technology and non-contact wireless transmission design method to realize sensor preparation.LC resonant circuit is used as basic working principle of sensor
by screen printing technology to achieve placement of passive devices such as inductance
capacitance
conduction band
and fill carbon film(printed carbon paste)in the cavity which effectively prevents the pyramid in the cavity collapses.The sensor avoids device packaging
wire connecting outside and lay a foundation for sensor working in high temperature